发明申请
- 专利标题: Methods of fabricating ferroelectric memory devices having expanded plate lines
- 专利标题(中): 制造具有扩展板线的铁电存储器件的方法
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申请号: US11029232申请日: 2005-01-04
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公开(公告)号: US20050117382A1公开(公告)日: 2005-06-02
- 发明人: Hyun-Ho Kim , Dong-Jin Jung , Ki-Nam Kim , Sang-Don Nam , Kyu-Mann Lee
- 申请人: Hyun-Ho Kim , Dong-Jin Jung , Ki-Nam Kim , Sang-Don Nam , Kyu-Mann Lee
- 优先权: KR2001-36624 20010626; KR2002-06192 20020204
- 主分类号: H01L27/105
- IPC分类号: H01L27/105 ; G11C11/22 ; H01L21/8246 ; H01L27/115
摘要:
A ferroelectric memory device includes a microelectronic substrate and a plurality of ferroelectric capacitors on the substrate, arranged as a plurality of rows and columns in respective row and column directions. A plurality of parallel plate lines overlie the ferroelectric capacitors and extend along the row direction, wherein a plate line contacts ferroelectric capacitors in at least two adjacent rows. The plurality of plate lines may include a plurality of local plate lines, and the ferroelectric memory device may further include an insulating layer disposed on the local plate lines and a plurality of main plate lines disposed on the insulating layer and contacting the local plate lines through openings in the insulating layer. In some embodiments, ferroelectric capacitors in adjacent rows share a common upper electrode, and respective ones of the local plate lines are disposed on respective ones of the common upper electrodes. Ferroelectric capacitors in adjacent rows may share a common ferroelectric dielectric region. Related fabrication methods are discussed.
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