发明申请
- 专利标题: Fast swapping station for wafer transport
- 专利标题(中): 快速交换台用于晶圆运输
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申请号: US10810361申请日: 2004-03-26
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公开(公告)号: US20050129496A1公开(公告)日: 2005-06-16
- 发明人: Peter Heiland , Ralf Tillmann
- 申请人: Peter Heiland , Ralf Tillmann
- 专利权人: Integrated Dynamics Engineering GmbH
- 当前专利权人: Integrated Dynamics Engineering GmbH
- 优先权: DE10314383.1 20030328
- 主分类号: B25J15/08
- IPC分类号: B25J15/08 ; B65G49/07 ; H01L21/677 ; H01L21/68 ; H01L21/687 ; B65F3/02
摘要:
An apparatus for accepting and transferring at least one disk-like member is provided. The apparatus includes a pick- and place-mechanism including gripping means. In effect, the mechanism is adapted to provide pick- and/or place-cycles, which during operation provides a movement of said gripping means between an up and a down position and vice versa, whereby, in the down position, said gripping means either picks the disk-like member from a load position or places the disk-like member onto the load position.
公开/授权文献
- US07234913B2 Fast swapping station for wafer transport 公开/授权日:2007-06-26