发明申请
US20050130620A1 Segmented radio frequency electrode apparatus and method for uniformity control 审中-公开
分段射频电极装置及均匀性控制方法

  • 专利标题: Segmented radio frequency electrode apparatus and method for uniformity control
  • 专利标题(中): 分段射频电极装置及均匀性控制方法
  • 申请号: US10735881
    申请日: 2003-12-16
  • 公开(公告)号: US20050130620A1
    公开(公告)日: 2005-06-16
  • 发明人: Andreas Fischer
  • 申请人: Andreas Fischer
  • 主分类号: H01J37/32
  • IPC分类号: H01J37/32 H01L20060101 H04B1/28
Segmented radio frequency electrode apparatus and method for uniformity control
摘要:
A segmented radio frequency (RF) powered electrode for use in plasma processing. The electrode includes a first electrode, a second electrode surrounding the first electrode, and a dielectric material interposed between the first electrode and the second electrode. The dielectric material electrically isolates the first electrode from the second electrode. At least one dual frequency radio frequency power source outputs RF power at a first frequency and a second frequency. The first frequency and the second frequency are different such that at least one radio frequency switch routes at least the first frequency or the second frequency from the at least one dual frequency source to the first electrode, the second electrode, or the first electrode and the second electrode.
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