- 专利标题: Load sensor with use of crystal resonator
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申请号: US11065209申请日: 2005-02-22
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公开(公告)号: US20050139016A1公开(公告)日: 2005-06-30
- 发明人: Masami Yamanaka , Motoyuki Adachi , Akio Chiba , Kozo Ono
- 申请人: Masami Yamanaka , Motoyuki Adachi , Akio Chiba , Kozo Ono
- 专利权人: Yamato Scale Co., Ltd.,Nihon Dempa Kogyo Co., Ltd.
- 当前专利权人: Yamato Scale Co., Ltd.,Nihon Dempa Kogyo Co., Ltd.
- 优先权: JP2001-175327 20010611
- 主分类号: G01G3/16
- IPC分类号: G01G3/16 ; G01G3/13 ; G01L1/10 ; H01L41/08 ; H01L41/18
摘要:
Excitation electrodes are respectively affixed to central portions of both surfaces of a long plate-shaped AT-cut crystal resonator, the central portion starts a thickness shear oscillation in the length direction of the crystal resonator when an electric signal is applied to the central portion of the crystal resonator through the excitation electrodes. And, channel-shaped, half-circular-shaped, or trapezoid grooves in cross-section are respectively formed in the plate width direction on middle portions between the center portion and end portions of the crystal resonator. These grooves are formed so as to be symmetrical with respect to a thicknesswise central position of the crystal resonator through a well-known etching technique such as photo-etching and the like.
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