发明申请
- 专利标题: Probe device
- 专利标题(中): 探头设备
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申请号: US11065273申请日: 2005-02-25
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公开(公告)号: US20050139770A1公开(公告)日: 2005-06-30
- 发明人: Takuya Matsumoto , Yasuhisa Naitoh , Tomoji Kawai
- 申请人: Takuya Matsumoto , Yasuhisa Naitoh , Tomoji Kawai
- 优先权: JP2002-245810 20020826
- 主分类号: G01Q60/34
- IPC分类号: G01Q60/34 ; G21K7/00 ; G01N23/00
摘要:
A probe device comprises a cantilever comprising a probe allocated to be opposed to a surface of a sample, means for feeding back a vibration amplitude value of the cantilever, thereby self-exciting and vibrating the cantilever at a predetermined frequency, means for applying a bias to the sample or the probe, and means for measuring a frequency shift caused by a charge-transfer force which acts between the cantilever and the sample.
公开/授权文献
- US07250602B2 Probe device 公开/授权日:2007-07-31