发明申请
- 专利标题: Sensor structure and method of fabricating the same
- 专利标题(中): 传感器结构及其制造方法
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申请号: US10913422申请日: 2004-08-09
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公开(公告)号: US20050142034A1公开(公告)日: 2005-06-30
- 发明人: Yong Kim , Yun Kim , Hae Yang , Young Kim , Seung Ha , Yoon Yang
- 申请人: Yong Kim , Yun Kim , Hae Yang , Young Kim , Seung Ha , Yoon Yang
- 优先权: KR2003-97259 20031226
- 主分类号: G01N27/40
- IPC分类号: G01N27/40 ; G01N27/02 ; G01N27/12
摘要:
Provided is a sensor structure comprising a heater and a temperature sensor at the center of a membrane having a well structure, allowing a temperature to be rapidly controlled with low power, and the object is analyzed using a conductivity change measured at two or more substrate temperatures with a pair of detecting electrode and a detecting layer implemented on the heater, wherein the sensing layer can include a conductive particle and a non-conductive organic composite.
公开/授权文献
- US07824618B2 Sensor structure and method of fabricating the same 公开/授权日:2010-11-02