- 专利标题： Thin film forming apparatus, film supplier, film cassette, transport mechanism and transport method
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申请号： US11052599申请日： 2005-02-07
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公开(公告)号： US20050150450A1公开(公告)日： 2005-07-14
- 发明人: Hideki Adachi
- 申请人： Hideki Adachi
- 专利权人： Dainippon Screen Mfg. Co., Ltd.
- 当前专利权人： Dainippon Screen Mfg. Co., Ltd.
- 优先权： JP2001-347427 20011113
- 主分类号： H01L21/285
- IPC分类号： H01L21/285 ; B32B38/18 ; H01L21/00 ; H01L21/283 ; H01L21/31 ; H01L21/677 ; H01L21/687 ; H01L21/768 ; B05C11/02 ; B05C13/00
摘要：
A center robot is fixed approximately in a central portion of a process part. A coating unit, a drying unit, a transfer unit, a peeling unit, a film supplying unit and a reversing unit are arranged around the center robot. The center robot comprises a hand-for-substrate and a hand-for-film which are allowed to directly access the respective units. Within a process part, the center robot transports a sheet film and/or a substrate between the coating unit, the drying unit, the transfer unit and the film supplying unit, and a thin film is formed on the substrate using the sheet film.