发明申请
- 专利标题: Narrow-body damascene tri-gate FinFET
- 专利标题(中): 窄体镶嵌三栅极FinFET
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申请号: US10754540申请日: 2004-01-12
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公开(公告)号: US20050153485A1公开(公告)日: 2005-07-14
- 发明人: Shibly Ahmed , Haihong Wang , Bin Yu
- 申请人: Shibly Ahmed , Haihong Wang , Bin Yu
- 主分类号: H01L21/336
- IPC分类号: H01L21/336 ; H01L29/786 ; H01L21/335
摘要:
A method of forming a fin field effect transistor includes forming a fin and forming a source region on a first end of the fin and a drain region on a second end of the fin. The method further includes forming a dummy gate with a first semi-conducting material in a first pattern over the fin and forming a dielectric layer around the dummy gate. The method also includes removing the first semi-conducting material to leave a trench in the dielectric layer corresponding to the first pattern, thinning a portion of the fin exposed within the trench, and forming a metal gate within the trench.
公开/授权文献
- US07186599B2 Narrow-body damascene tri-gate FinFET 公开/授权日:2007-03-06
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