发明申请
- 专利标题： Trench capacitor with buried strap
- 专利标题（中）： 带埋地带的沟槽电容器
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申请号： US11053508申请日： 2005-02-08
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公开(公告)号： US20050158961A1公开(公告)日： 2005-07-21
- 发明人: Helmut Tews , Jochen Beintner , Stephan Kudelka
- 申请人： Helmut Tews , Jochen Beintner , Stephan Kudelka
- 主分类号： H01L21/20
- IPC分类号： H01L21/20 ; H01L21/8242 ; H01L27/108 ; H01L33/00
摘要：
A trench capacitor with improved strap is disclosed. The strap is located above the top surface of the capacitor. The top surface of the trench capacitor, which is formed by the top surfaces of the collar and storage plate, is planar. By locating the strap on a planar surface, the divot present in conventional strap processes is avoided. This results in improved strap reliability and device performance.
公开/授权文献
- US07157329B2 Trench capacitor with buried strap 公开/授权日：2007-01-02
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