发明申请
- 专利标题: Fabrication method for arranging ultra-fine particles
- 专利标题(中): 用于排列超细颗粒的制造方法
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申请号: US10759589申请日: 2004-01-15
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公开(公告)号: US20050158988A1公开(公告)日: 2005-07-21
- 发明人: Seung-Heon Lee , Frederic Diana , Antonio Badolato , Pierre Petroff , Edward Kramer
- 申请人: Seung-Heon Lee , Frederic Diana , Antonio Badolato , Pierre Petroff , Edward Kramer
- 主分类号: G11B5/706
- IPC分类号: G11B5/706 ; H01F1/00 ; H01F1/153 ; H01L21/4763
摘要:
A method and resultant device, in which metal nanoparticles are self-assembled into two-dimensional lattices. A periodic hole pattern (wells) is fabricated on a photoresist substrate, the wells having an aspect ratio of less than 0.37. The nanoparticles are synthesized within inverse micelles of a polymer, preferably a block copolymer, and are self-assembled onto the photoresist nanopatterns. The nanoparticles are selectively positioned in the holes due to the capillary forces related to the pattern geometry, with a controllable number of particles per lattice point.
公开/授权文献
- US06989324B2 Fabrication method for arranging ultra-fine particles 公开/授权日:2006-01-24
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