发明申请
- 专利标题： Silazane compound and methods for using the same
- 专利标题（中）： 硅氮烷化合物及其使用方法
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申请号： US11033300申请日： 2005-01-12
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公开(公告)号： US20050164126A1公开(公告)日： 2005-07-28
- 发明人: Kyoung-Mi Kim , Yeu-Young Youn , Jae-Ho Kim , Young-Ho Kim , Shi-Yong Yi
- 申请人： Kyoung-Mi Kim , Yeu-Young Youn , Jae-Ho Kim , Young-Ho Kim , Shi-Yong Yi
- 优先权： KR2004-3307 20040116
- 主分类号： C07F7/10
- IPC分类号： C07F7/10 ; C07F7/12 ; G03C1/492 ; G03F7/075
摘要：
An adhesive compound for use with a photoresist, the compound represented in accordance with the following chemical formula, A method for forming a photoresist pattern using the adhesive compound is also disclosed.
公开/授权文献
- US07070910B2 Silazane compound amd methods for using the same 公开/授权日：2006-07-04
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