Invention Application
US20050169570A1 Micro optical bench structure and method of manufacturing the same 有权
微型光学台架结构及其制造方法

Micro optical bench structure and method of manufacturing the same
Abstract:
A micro optical bench structure and a method of manufacturing a micro optical bench structure are provided. The micro optical bench structure includes: a lower substrate; an upper substrate which is bonded to the lower substrate, and has a through-hole for exposing the lower substrate; and a first optical device which is installed at the lower substrate, and units relating to the first optical device.
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