发明申请
- 专利标题: Gas friction pump
- 专利标题(中): 气摩擦泵
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申请号: US10773475申请日: 2004-02-05
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公开(公告)号: US20050169745A1公开(公告)日: 2005-08-04
- 发明人: Armin Conrad , Joerg Stanzel
- 申请人: Armin Conrad , Joerg Stanzel
- 优先权: EP04001872.3 20040129
- 主分类号: F04D29/056
- IPC分类号: F04D29/056 ; F04D19/04 ; F04D23/00 ; F04D29/04 ; F04D29/048 ; F04D29/057 ; F04D29/10 ; F16C32/04 ; F16C32/06 ; F16C33/80 ; F01D1/36
摘要:
A gas friction pump, comprising stationary pump-active components (14) and rotatable pump-active components (15) secured on a rotatable rotor shaft (4), wherein the rotor shaft is supported with a bearing (5) at the high-vacuum-side end and a bearing arrangement at a fore-vacuum side end, characterized in that the high-vacuum side bearing is formed as a conventional bearing, and the fore-vacuum bearing arrangement contains at least one gas bearing. In an advantageous embodiment, the gas bearing is formed as a module and can be brought in engagement with a cylindrical portion of the housing and secured therein.
公开/授权文献
- US07059828B2 Gas friction pump 公开/授权日:2006-06-13
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