发明申请
- 专利标题: Pressure sensor
- 专利标题(中): 压力传感器
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申请号: US11046792申请日: 2005-02-01
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公开(公告)号: US20050172724A1公开(公告)日: 2005-08-11
- 发明人: Minekazu Sakai , Yasutoshi Suzuki
- 申请人: Minekazu Sakai , Yasutoshi Suzuki
- 专利权人: DENSO CORPORATION
- 当前专利权人: DENSO CORPORATION
- 优先权: JP2004-31687 20040209
- 主分类号: G01L9/00
- IPC分类号: G01L9/00 ; G01L9/06 ; G01L19/00 ; G01L19/06 ; H01L29/84
摘要:
A pressure sensor includes a semiconductor substrate and a pedestal member such as a glass pedestal. The semiconductor substrate has a diaphragm for detecting a pressure and a thick portion positioned around the diaphragm. The pedestal member has one surface bonded to the thick portion of the semiconductor substrate and the other surface opposite to the one surface. In the pressure sensor, the pedestal member has a through hole through which pressure is introduced to the diaphragm. The through hole penetrates through the pedestal member from an opening of the other surface to the one surface of the pedestal member, and the through hole has a hole diameter that becomes smaller from the one surface toward the other surface of the pedestal member. Accordingly, it can effectively restrict foreign materials such as dusts from being introduced into the through hole of the pressure sensor.
公开/授权文献
- US07197939B2 Pressure sensor 公开/授权日:2007-04-03