发明申请
US20050173003A1 Liquid flow controller and precision dispense apparatus and system
失效
液体流量控制器和精密分配装置及系统
- 专利标题: Liquid flow controller and precision dispense apparatus and system
- 专利标题(中): 液体流量控制器和精密分配装置及系统
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申请号: US10520635申请日: 2003-07-18
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公开(公告)号: US20050173003A1公开(公告)日: 2005-08-11
- 发明人: Marc Laverdiere , Robert McLoughlin , George Gonnella , Iraj Gashgaee , Jennifer Marrs
- 申请人: Marc Laverdiere , Robert McLoughlin , George Gonnella , Iraj Gashgaee , Jennifer Marrs
- 申请人地址: US MA BILLERICA, 01821-4600
- 专利权人: MYKROLIS CORPORATION
- 当前专利权人: MYKROLIS CORPORATION
- 当前专利权人地址: US MA BILLERICA, 01821-4600
- 国际申请: PCT/US03/22579 WO 20030718
- 主分类号: G05D7/06
- IPC分类号: G05D7/06 ; G05D16/20
摘要:
Apparatus and a control system for monitoring (preferably digitally) and/or controlling pressure to a pneumatic load such as a proportional fluid control valve and using a measurement input from a fluid measuremenc device that responds to a flow rate, the liquid measurement input being used to control the pressure to the pneumatic load so that pneumatic load may be increased or decreased (to proportionally open or close the pneumatic valve) to change the flow rate of the fluid to a desired rate. The pneumatic load can also be adjusted (to proportionally open or close the pneumatic valve) to accommodate changes in temperature and viscosity of a fluid.
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