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公开(公告)号：US08814536B2
公开(公告)日：2014-08-26
申请号：US13554746
申请日：2012-07-20
申请人： Marc Laverdiere , James Cedrone , George Gonnella , Iraj Gashgaee , Paul Magoon , Timothy J. King
发明人： Marc Laverdiere , James Cedrone , George Gonnella , Iraj Gashgaee , Paul Magoon , Timothy J. King
CPC分类号： F04B43/02 , F04B13/00 , F04B49/065 , F04B2201/0201 , F04B2205/09
摘要： Embodiments of the invention provide a system, method and computer program product for reducing the hold-up volume of a pump. More particularly, embodiments of the invention can determine, prior to dispensing a fluid, a position for a diaphragm in a chamber to reduce a hold-up volume at a dispense pump and/or a feed pump. This variable home position of the diaphragm can be determined based on a set of factors affecting a dispense operation. Example factors may include a dispense volume and an error volume. The home position for the diaphragm can be selected such that the volume of the chamber at the dispense pump and/or feed pump contains sufficient fluid to perform the various steps of a dispense cycle while minimizing the hold-up volume. Additionally, the home position of the diaphragm can be selected to optimize the effective range of positive displacement.
摘要翻译： 本发明的实施例提供了一种用于减小泵的保持容积的系统，方法和计算机程序产品。 更具体地，本发明的实施例可以在分配流体之前确定腔室中的隔膜的位置，以减少分配泵和/或进料泵处的滞留体积。 可以基于影响分配操作的一组因素来确定隔膜的该可变原始位置。 示例因素可能包括分配量和错误量。 可以选择隔膜的原始位置，使得在分配泵和/或进料泵处的室的体积包含足够的流体，以在最小化保持容积的同时执行分配循环的各个步骤。 另外，可以选择隔膜的原位来优化正位移的有效范围。
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公开(公告)号：US20120288379A1
公开(公告)日：2012-11-15
申请号：US13554746
申请日：2012-07-20
申请人： Marc Laverdiere , James Cedrone , George Gonnella , Iraj Gashgaee , Paul Magoon , Timothy J. King
发明人： Marc Laverdiere , James Cedrone , George Gonnella , Iraj Gashgaee , Paul Magoon , Timothy J. King
IPC分类号： F04B45/04
CPC分类号： F04B43/02 , F04B13/00 , F04B49/065 , F04B2201/0201 , F04B2205/09
摘要： Embodiments of the invention provide a system, method and computer program product for reducing the hold-up volume of a pump. More particularly, embodiments of the invention can determine, prior to dispensing a fluid, a position for a diaphragm in a chamber to reduce a hold-up volume at a dispense pump and/or a feed pump. This variable home position of the diaphragm can be determined based on a set of factors affecting a dispense operation. Example factors may include a dispense volume and an error volume. The home position for the diaphragm can be selected such that the volume of the chamber at the dispense pump and/or feed pump contains sufficient fluid to perform the various steps of a dispense cycle while minimizing the hold-up volume. Additionally, the home position of the diaphragm can be selected to optimize the effective range of positive displacement.
摘要翻译： 本发明的实施例提供了一种用于减小泵的保持容积的系统，方法和计算机程序产品。 更具体地，本发明的实施例可以在分配流体之前确定腔室中的隔膜的位置，以减少分配泵和/或进料泵处的滞留体积。 可以基于影响分配操作的一组因素来确定隔膜的该可变原始位置。 示例因素可能包括分配量和错误量。 可以选择隔膜的原始位置，使得在分配泵和/或进料泵处的室的体积包含足够的流体，以在最小化保持容积的同时执行分配循环的各个步骤。 另外，可以选择隔膜的原位来优化正位移的有效范围。
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3.发明授权System for controlling valve fluid flow based on rate of change of close rate acceleration 有权基于速率加速度变化率控制阀门流体流量的系统公开(公告)号：US08082066B2
公开(公告)日：2011-12-20
申请号：US11937931
申请日：2007-11-09
CPC分类号： G05D7/0635 , H01L21/6715 , Y10T137/0989
摘要： Embodiments of the present invention provide systems and methods of controlling fluid dispense to ensure clean break off of fluid at the end of a dispense process and to reduce crystallization of fluid in the dispense nozzle. One embodiment of the present invention can include a controller that can, generate a flow control signal to cause a control valve to close according to a first close rate parameter for a first segment of the close range and to generate the flow control signal to cause the control valve to close according to a second close rate parameter for a second segment of the close range.
摘要翻译： 本发明的实施例提供了控制流体分配的系统和方法，以确保在分配过程结束时清洁液体的分离并减少分配喷嘴中的流体结晶。 本发明的一个实施例可以包括一个控制器，该控制器可以产生一个流量控制信号，以使控制阀根据第一关闭速率参数的关闭速率参数关闭，并产生流量控制信号， 控制阀根据第二关闭速率参数关闭近距离的第二段。
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公开(公告)号：US07610117B2
公开(公告)日：2009-10-27
申请号：US11229912
申请日：2005-09-19
IPC分类号： G06F19/00
CPC分类号： G01F1/363 , G05D7/0635 , Y10T137/7761
摘要： One embodiment of the present invention can include a flow control device comprising an inlet, an outlet, a pressure loss element between the inlet and outlet, a pressure sensor located upstream from the constriction configured to measure a first pressure of a fluid flowing through the flow control device, a pressure sensor located downstream from the constriction, configured to measure a second pressure of the fluid flowing through the flow control device; and a controller coupled to the first pressure sensor and the second pressure sensor to generate a valve drive signal. The controller can generate a valve control signal based on a differential between the first pressure and the second pressure during a first mode of operation. The controller can also generate a valve control signal based on a measured pressure at a particular pressure sensor during a second mode of operation. The mode of operation can automatically switch.
摘要翻译： 本发明的一个实施例可以包括流量控制装置，其包括入口，出口，在入口和出口之间的压力损失元件，位于收缩部上游的压力传感器，其被配置成测量流过流动的流体的第一压力 控制装置，位于收缩部下游的压力传感器，被配置为测量流过所述流量控制装置的流体的第二压力; 以及耦合到第一压力传感器和第二压力传感器以产生阀驱动信号的控制器。 控制器可以在第一操作模式期间基于第一压力和第二压力之间的差值产生阀控制信号。 控制器还可以在第二操作模式期间基于特定压力传感器处的测量压力产生阀门控制信号。 操作模式可以自动切换。
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公开(公告)号：US07469932B2
公开(公告)日：2008-12-30
申请号：US11599195
申请日：2006-11-14
IPC分类号： F16L39/00
CPC分类号： F16L39/00
摘要： A stationary receptor for a separation module is positioned between a pump housing and the separation module. The stationary receptor has a pivot line and two shelves on its outer surface which permit fitting the separation module into the stationary receptor adjacent the pump housing. The separation module has a housing, a filter within the housing and at least one outlet and one inlet, which are positioned to mate with fittings of the pump housing.
摘要翻译： 用于分离模块的固定接收器定位在泵壳体和分离模块之间。 固定式接收器在其外表面上具有枢转线和两个搁架，其允许将分离模块装配到邻近泵壳体的静止接收器中。 分离模块具有壳体，壳体内的过滤器和至少一个出口和一个入口，其定位成与泵壳体的配件配合。
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公开(公告)号：US20080185044A1
公开(公告)日：2008-08-07
申请号：US12024689
申请日：2008-02-01
申请人： Michael Clarke , Marc Laverdiere , Robert F. McLoughlin , J. Karl Niermeyer , Joseph E. Smith , Rosario Mollica
发明人： Michael Clarke , Marc Laverdiere , Robert F. McLoughlin , J. Karl Niermeyer , Joseph E. Smith , Rosario Mollica
CPC分类号： B01F5/0685 , B01F3/088 , G05D11/132 , Y10T137/0329
摘要： Embodiments disclosed herein provide a pump or a multiple-pump system that can mix chemicals without dilution tanks and can dispense the mixture of chemicals in a precise and highly controllable manner, particularly useful in semiconductor manufacturing processes. In some embodiments, one or more piston pumps of similar displacement are used to mix and dispense the chemical directly. A first valve is opened to a first chemical source. A piston is moved in a first direction to a selected position in a chamber to draw the first chemical into the chamber. The first valve is closed and a second valve is opened to a second chemical source. The piston is moved in the first direction to a second position in the chamber to draw in the second chemical and mix the chemicals. The second valve is closed and the piston is moved to dispense the fluids through a dispense port.
摘要翻译： 本文公开的实施例提供了一种泵或多泵系统，其可以混合没有稀释罐的化学品，并且可以精确和高度可控的方式分配化学品的混合物，特别适用于半导体制造过程。 在一些实施例中，使用类似位移的一个或多个活塞泵来直接混合和分配化学品。 第一阀打开到第一化学源。 活塞在第一方向上移动到室中的选定位置以将第一化学品吸入室中。 第一阀关闭，第二阀打开到第二化学源。 活塞沿第一方向移动到腔室中的第二位置以吸入第二化学品并混合化学品。 关闭第二个阀门并移动活塞以通过分配口分配流体。
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公开(公告)号：US20140238922A1
公开(公告)日：2014-08-28
申请号：US14349623
申请日：2012-10-03
IPC分类号： B01D35/12
CPC分类号： B01D35/12 , B01D29/07 , B01D35/303 , B01D46/521 , B01D2201/12
摘要： The present disclosure relates to modular filtration systems using removable filter cassettes for filtering liquids including, for example, liquids used in semiconductor manufacturing. A filtration system may include a removable filter cassette having a filter inlet port and a filter outlet port, a filter cassette holder configured to receive and retain the filter cassette, and a main assembly. The main assembly can further comprise a filter inlet interface port configured to receive the filter inlet port, and a filter outlet interface port configured to receive the filter outlet port and can define flow paths to direct flow to and from the filter cassette. The filter cassette holder may be movably coupled to the main assembly such that the filter cassette is movable relative to the main assembly from an unmated position to a mated position.
摘要翻译： 本公开涉及使用可移除的过滤盒用于过滤液体的模块化过滤系统，包括例如半导体制造中使用的液体。 过滤系统可以包括具有过滤器入口和过滤器出口的可移除过滤器盒，被配置为接收和保持过滤盒的过滤器盒保持架和主组件。 主组件还可以包括被配置为接收过滤器入口端口的过滤器入口接口端口和被配置为接收过滤器出口端口并且可以限定流动路径的过滤器出口接口端口，以引导流过过滤器滤芯和从过滤器盒带出流。 过滤器盒保持器可以可移动地联接到主组件，使得过滤器盒可以相对于主组件从未配合位置移动到配合位置。
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公开(公告)号：US20120090704A1
公开(公告)日：2012-04-19
申请号：US13300772
申请日：2011-11-21
IPC分类号： F16K31/12
CPC分类号： G05D7/0617 , G05D16/2013 , Y10T137/0396 , Y10T137/7758 , Y10T137/776 , Y10T137/7761
摘要： Apparatus and a control system for monitoring (preferably digitally) and/or controlling pressure to a pneumatic load such as a proportional fluid control valve and using a measurement input from a fluid measurement device that responds to a flow rate, the liquid measurement input being used to control the pressure to the pneumatic load so that pneumatic load may be increased or decreased (to proportionally open or close the pneumatic valve) to change the flow rate of the fluid to a desired rate. The pneumatic load can also be adjusted (to proportionally open or close the pneumatic valve) to accommodate changes in temperature and viscosity of a fluid.
摘要翻译： 装置和控制系统，用于监控（优选数字化）和/或控制诸如比例流体控制阀的气动负载的压力，并使用来自响应于流量的流体测量装置的测量输入，所使用的液体测量输入 以控制气动负载的压力，使得可以增加或减少气动负载（以比例地打开或关闭气动阀），以将流体的流速改变到期望的速率。 也可以调节气动负载（按比例打开或关闭气动阀），以适应流体温度和粘度的变化。
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公开(公告)号：US20110281652A1
公开(公告)日：2011-11-17
申请号：US13146679
申请日：2010-02-01
申请人： Marc Laverdiere
发明人： Marc Laverdiere
CPC分类号： G06F3/0219 , G06F3/0238 , G06F17/00 , G11B27/00 , G11B27/326 , G11B27/34 , H05K5/0256
摘要： Methods and systems for a media player having one-touch capability are disclosed. This capability reduces the complexity of MP3 players such that a one-year-old could use and enjoy the device, yet be desirable to users of any age. Also disclosed are the means to manufacture, sell, and provide various levels of user customization for the media player. Other embodiments provide an MP3-style device with the potential for use in a wide range of additional applications.
摘要翻译： 公开了具有一触式能力的媒体播放器的方法和系统。 这种功能降低了MP3播放器的复杂性，使得一岁的人可以使用和享受该设备，但对于任何年龄的用户来说都是可取的。 还公开了为媒体播放器制造，销售和提供各种级别的用户定制的手段。 其他实施例提供具有在广泛的附加应用中使用的潜力的MP3式设备。
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公开(公告)号：US20090132094A1
公开(公告)日：2009-05-21
申请号：US11666124
申请日：2005-11-21
申请人： Marc Laverdiere , James Cedrone , George Gonnella , Iraj Gashgaee , Paul Magoon , Timothy J. King
发明人： Marc Laverdiere , James Cedrone , George Gonnella , Iraj Gashgaee , Paul Magoon , Timothy J. King
CPC分类号： F04B43/02 , F04B13/00 , F04B49/065 , F04B2201/0201 , F04B2205/09
摘要： Embodiments of the present, invention provide a system and method for reducing the hold-up volume of a pump. More particularly, embodiments of the present invention provide a system and method for determining a home position to reduce hold-up volume at a dispense pump and/or a feed pump. The home position for the diaphragm can be selected such that the volume of the chamber at the dispense pump and/or feed pump contains sufficient fluid to perform the various steps of a dispense cycle while minimizing the hold-up volume. Additionally, the home position of the diaphragm can be selected to optimize the effective range of positive displacement.
摘要翻译： 本发明的实施例提供了一种用于减小泵的保持容积的系统和方法。 更具体地，本发明的实施例提供了一种用于确定原始位置以减少分配泵和/或进料泵的滞留体积的系统和方法。 可以选择隔膜的原始位置，使得在分配泵和/或进料泵处的室的体积包含足够的流体，以在最小化保持容积的同时执行分配循环的各个步骤。 另外，可以选择隔膜的原位来优化正位移的有效范围。
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