发明申请
- 专利标题: Configurable prober for TFT LCD array testing
- 专利标题(中): 用于TFT LCD阵列测试的可配置探头
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申请号: US10889695申请日: 2004-07-12
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公开(公告)号: US20050179451A1公开(公告)日: 2005-08-18
- 发明人: Matthias Brunner , Shinichi Kurita , Ralf Schmid , Fayez Frank Abboud , Benjamin Johnston , Paul Bocian , Emanuel Beer
- 申请人: Matthias Brunner , Shinichi Kurita , Ralf Schmid , Fayez Frank Abboud , Benjamin Johnston , Paul Bocian , Emanuel Beer
- 专利权人: APPLIED MATERIALS, INC.
- 当前专利权人: APPLIED MATERIALS, INC.
- 主分类号: G01R31/302
- IPC分类号: G01R31/302 ; G01R31/26 ; G01R31/305 ; G02F1/13 ; G09G3/00 ; H01L21/687
摘要:
An improved prober for an electronic devices test system is provided. The prober is “configurable,” meaning that it can be adapted for different device layouts and substrate sizes. The prober generally includes a frame, at least one prober bar having a first end and a second end, a frame connection mechanism that allows for ready relocation of the prober bar to the frame at selected points along the frame, and a plurality of electrical contact pins along the prober bar for placing selected electronic devices in electrical communication with a system controller during testing. In one embodiment, the prober is be used to test devices such as thin film transistors on a glass substrate. Typically, the glass substrate is square, and the frame is also square. In this way, “x” and “y” axes are defined by the frame.
公开/授权文献
- US07319335B2 Configurable prober for TFT LCD array testing 公开/授权日:2008-01-15
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