发明申请
- 专利标题： Optical deflector and method of producing same
- 专利标题（中）： 光偏转器及其制作方法
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申请号： US11101515申请日： 2005-04-08
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公开(公告)号： US20050179985A1公开(公告)日： 2005-08-18
- 发明人: Takahisa Kato , Takayuki Yagi , Yasuhiro Shimada
- 申请人： Takahisa Kato , Takayuki Yagi , Yasuhiro Shimada
- 申请人地址： JP Tokyo
- 专利权人： CANON KABUSHIKI KAISHA
- 当前专利权人： CANON KABUSHIKI KAISHA
- 当前专利权人地址： JP Tokyo
- 优先权： JP2002-197129 20020705
- 主分类号： B41J2/44
- IPC分类号： B41J2/44 ; B81B3/00 ; B81C1/00 ; G02B26/08 ; G02B26/10 ; H04N1/036 ; H04N1/113 ; H04N5/74 ; G02F1/29
摘要：
There are provided a small optical deflector that can be driven at a high speed with a low voltage, provides a large angle of deflection, has a low distortion even in high speed operation and has a high static flatness of a reflective surface, and a method of producing the optical deflector. The optical deflector drives a movable plate relative to a supporting substrate to deflect a light incident on a reflective surface and has a configuration in which at least two recesses are formed in a surface of the movable plate on which the reflective surface is not formed, and a magnetic material is provided in the recesses.
公开/授权文献
- US07038834B2 Optical deflector and method of producing same 公开/授权日：2006-05-02
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