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    Optical deflector and method of producing same
    4.
    发明授权
    Optical deflector and method of producing same 失效
    光偏转器及其制作方法

    公开(公告)号：US07038834B2

    公开(公告)日：2006-05-02

    申请号：US11101515

    申请日：2005-04-08

    申请人： Takahisa Kato ,  Takayuki Yagi ,  Yasuhiro Shimada

    发明人： Takahisa Kato ,  Takayuki Yagi ,  Yasuhiro Shimada

    IPC分类号： G02B26/08

    CPC分类号： G02B26/085 ,  G02B26/105 ,  H04N5/7441

    摘要： There are provided a small optical deflector that can be driven at a high speed with a low voltage, provides a large angle of deflection, has a low distortion even in high speed operation and has a high static flatness of a reflective surface, and a method of producing the optical deflector. The optical deflector drives a movable plate relative to a supporting substrate to deflect a light incident on a reflective surface and has a configuration in which at least two recesses are formed in a surface of the movable plate on which the reflective surface is not formed, and a magnetic material is provided in the recesses.

    摘要翻译： 提供了能够以低电压高速驱动的小型光学偏转器，提供大的偏转角度，即使在高速运转中也具有低的变形，并且具有反射表面的高静态平坦度， 制造光学偏转器。 光学偏转器相对于支撑基板驱动可移动板以使入射在反射表面上的光偏转，并且具有在其上未形成反射表面的可动板的表面中形成至少两个凹部的构造，以及 在凹部中设置磁性材料。

    Light deflector, method of manufacturing light deflector and torsion oscillating member
    9.
    发明申请
    Light deflector, method of manufacturing light deflector and torsion oscillating member 失效
    光偏转器，制造导光板和扭转摆动构件的方法

    公开(公告)号：US20050185240A1

    公开(公告)日：2005-08-25

    申请号：US11117357

    申请日：2005-04-29

    申请人： Takahisa Kato ,  Takayuki Yagi ,  Yasuhiro Shimada ,  Yukio Furukawa

    发明人： Takahisa Kato ,  Takayuki Yagi ,  Yasuhiro Shimada ,  Yukio Furukawa

    IPC分类号： B41J2/44 ,  B81B3/00 ,  B81C1/00 ,  G02B7/182 ,  G02B26/08 ,  G02B26/10 ,  G02F1/29

    CPC分类号： G02B7/1821 ,  G02B26/085 ,  Y10S359/90

    摘要： There is disclosed a light deflector in which both ends of a movable plate is supported to a support substrate by an elastic support portion, a reflection surface is formed on one surface of the movable plate, and the movable plate is torsion-oscillated about a torsion axis of the elastic support portion as a center to deflect an incident light that enters the reflection surface, wherein a recessed portion is formed on at least one side surface of both sides, which is a surface on which the reflection surface is not formed, and between which the torsion axis of the elastic support portion is interposed.

    摘要翻译： 公开了一种光偏转器，其中可动板的两端通过弹性支撑部支撑在支撑基板上，反射面形成在可动板的一个表面上，并且可动板围绕扭转扭转振荡 弹性支撑部分的轴线作为中心以偏转入射到反射表面的入射光，其中在作为未形成反射面的表面的两侧的至少一个侧表面上形成有凹部，以及 弹性支撑部的扭转轴插入其间。

    Optical deflector and method of producing same
    10.
    发明申请
    Optical deflector and method of producing same 失效
    光偏转器及其制作方法

    公开(公告)号：US20050179985A1

    公开(公告)日：2005-08-18

    申请号：US11101515

    申请日：2005-04-08

    申请人： Takahisa Kato ,  Takayuki Yagi ,  Yasuhiro Shimada

    发明人： Takahisa Kato ,  Takayuki Yagi ,  Yasuhiro Shimada

    IPC分类号： B41J2/44 ,  B81B3/00 ,  B81C1/00 ,  G02B26/08 ,  G02B26/10 ,  H04N1/036 ,  H04N1/113 ,  H04N5/74 ,  G02F1/29

    CPC分类号： G02B26/085 ,  G02B26/105 ,  H04N5/7441

    摘要： There are provided a small optical deflector that can be driven at a high speed with a low voltage, provides a large angle of deflection, has a low distortion even in high speed operation and has a high static flatness of a reflective surface, and a method of producing the optical deflector. The optical deflector drives a movable plate relative to a supporting substrate to deflect a light incident on a reflective surface and has a configuration in which at least two recesses are formed in a surface of the movable plate on which the reflective surface is not formed, and a magnetic material is provided in the recesses.

    摘要翻译： 提供了能够以低电压高速驱动的小型光学偏转器，提供大的偏转角度，即使在高速运转中也具有低的变形，并且具有反射表面的高静态平坦度， 制造光学偏转器。 光学偏转器相对于支撑基板驱动可移动板以使入射在反射表面上的光偏转，并且具有在其上未形成反射表面的可动板的表面中形成至少两个凹部的构造，以及 在凹部中设置磁性材料。