发明申请
US20050184156A1 Optical scanner control method, optical scanner and laser machining apparatus
有权
光学扫描仪控制方法,光学扫描仪和激光加工设备
- 专利标题: Optical scanner control method, optical scanner and laser machining apparatus
- 专利标题(中): 光学扫描仪控制方法,光学扫描仪和激光加工设备
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申请号: US10929519申请日: 2004-08-31
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公开(公告)号: US20050184156A1公开(公告)日: 2005-08-25
- 发明人: Haruaki Otsuki , Souichi Toyama , Kenta Seki , Yaichi Okubo , Daisuke Kitamura
- 申请人: Haruaki Otsuki , Souichi Toyama , Kenta Seki , Yaichi Okubo , Daisuke Kitamura
- 申请人地址: JP Ebina-shi
- 专利权人: Hitachi Via Mechanics Ltd.
- 当前专利权人: Hitachi Via Mechanics Ltd.
- 当前专利权人地址: JP Ebina-shi
- 优先权: JP2004-043050 20040219
- 主分类号: B23K26/00
- IPC分类号: B23K26/00 ; B23K26/08 ; G02B5/08 ; G02B7/182 ; G02B26/00 ; G02B26/10 ; G02B26/12 ; G06K7/10 ; G06K7/14 ; H05K3/00
摘要:
A optical scanner control method and a optical scanner capable of positioning a mirror at a high speed independently of a rocking angle, and a laser machining apparatus for irradiating a printed circuit board with a laser beam by use of the optical scanner to thereby perforate the printed circuit board. In order to operate an actuator for rocking the mirror based on a deviation of a current position from an commanded value, a change in gain of the actuator is measured in accordance with each rocking angle in advance, and the manipulated variable of the actuator is corrected to cancel the change in gain. Thus, the influence of the alteration of a torque constant in accordance with the rocking angle can be suppressed so that the response characteristic becomes uniform all over a scanning region, and the positioning speed can be improved.
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