发明申请
US20050185336A1 [FILM REMOVING EQUIPMENT, ERASING DEVICE AND METHOD OF FABRICATING ORGANIC ELECTRO-LUMINESCENT DEVICE]
审中-公开
[膜剥离装置,擦除装置及制造有机电致发光器件的方法]
- 专利标题: [FILM REMOVING EQUIPMENT, ERASING DEVICE AND METHOD OF FABRICATING ORGANIC ELECTRO-LUMINESCENT DEVICE]
- 专利标题(中): [膜剥离装置,擦除装置及制造有机电致发光器件的方法]
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申请号: US10709466申请日: 2004-05-07
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公开(公告)号: US20050185336A1公开(公告)日: 2005-08-25
- 发明人: Chun-Chien Chen , Chi-Kuei Liao , Chih-Chiang Huang , Lai-Cheng Chen
- 申请人: Chun-Chien Chen , Chi-Kuei Liao , Chih-Chiang Huang , Lai-Cheng Chen
- 优先权: TW93104549 20040224
- 主分类号: H05B33/10
- IPC分类号: H05B33/10 ; G11B5/03 ; H01L51/00 ; H01L51/50 ; H01L51/56 ; H05B33/14
摘要:
A film removing equipment for removing a film from a substrate is provided. The film removing equipment comprises a base, a transmission mechanism of the erasing device, an erasing device and a positioning platform. The transmission mechanism of the erasing device is set up on the base and the erasing device is set up on the transmission mechanism. The positioning platform is set up on the base to carry the substrate. The transmission mechanism drives the erasing device to remove the film from the substrate. Using the aforementioned film removing equipment, the cost of removing a film from a substrate is reduced substantially.
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