发明申请
- 专利标题： Work piece transfer system for an ion beam implanter
- 专利标题（中）： 用于离子束注入机的工件传送系统
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申请号： US10794009申请日： 2004-03-05
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公开(公告)号： US20050194549A1公开(公告)日： 2005-09-08
- 发明人: Kan Ota , Mehran Asdigha
- 申请人： Kan Ota , Mehran Asdigha
- 主分类号： H01L21/677
- IPC分类号： H01L21/677 ; H01J37/317 ; H01J37/18 ; H01J37/20
摘要：
A work piece transfer apparatus for use with an ion beam implanter for treating a work piece at sub-atmospheric pressure. The work piece transfer apparatus includes an evacuable load lock system in fluid communication with an interior region the implantation chamber interior region. The load lock system includes a support surface for supporting the work piece with an opening aligned with the work piece. The work piece transfer apparatus further includes a work piece support within the implantation chamber having a pedestal supported by a linkage with two degrees of freedom. The linkage moves the pedestal transversely through the load lock support surface opening to pick up the work piece from the support surface prior to treatment. The pedestal holds the work piece in position in the implantation chamber for treatment. The linkage then moves the pedestal transversely through the load lock support surface opening to deposit the work piece on the support surface subsequent to treatment.
公开/授权文献
- US06987272B2 Work piece transfer system for an ion beam implanter 公开/授权日：2006-01-17
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