发明申请
US20050195464A1 Micro mirror device with adjacently suspended spring and method for the same 有权
具有相邻悬挂弹簧的微镜装置及其相同方法

Micro mirror device with adjacently suspended spring and method for the same
摘要:
A method and apparatus providing a micro-mirror device configured to increase actuation speed thereof. The micro-mirror device includes a substrate, a mirror, a spring member and at least one adjacent micro-mirror device. The mirror is suspended over the substrate and configured to deflect in response to an actuation force. The spring member is suspended between the substrate and the mirror. Further, the spring member is configured to store energy upon being deflected by the mirror and is configured to release the stored energy to force the mirror to another position. The at least one adjacent micro-mirror device is positioned over the substrate adjacent the mirror and is configured to suspend the spring member.
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