公开(公告)号：US20050195464A1

公开(公告)日：2005-09-08

申请号：US10793977

申请日：2004-03-05

申请人： Kenneth Faase ,  Adel Jilani ,  James Guo ,  Torry Cruz-Uribe

发明人： Kenneth Faase ,  Adel Jilani ,  James Guo ,  Torry Cruz-Uribe

IPC分类号： G02B26/00

CPC分类号： G02B26/0841 ,  B81B3/0045 ,  B81B2201/042 ,  B81B2203/0109 ,  B81B2203/058 ,  G02B1/06 ,  Y10S359/904

摘要： A method and apparatus providing a micro-mirror device configured to increase actuation speed thereof. The micro-mirror device includes a substrate, a mirror, a spring member and at least one adjacent micro-mirror device. The mirror is suspended over the substrate and configured to deflect in response to an actuation force. The spring member is suspended between the substrate and the mirror. Further, the spring member is configured to store energy upon being deflected by the mirror and is configured to release the stored energy to force the mirror to another position. The at least one adjacent micro-mirror device is positioned over the substrate adjacent the mirror and is configured to suspend the spring member.

摘要翻译： 提供构造成增加其致动速度的微镜装置的方法和装置。 微反射镜装置包括基板，反射镜，弹簧构件和至少一个相邻的微反射镜装置。 反射镜悬挂在基板上并被配置为响应于致动力而偏转。 弹簧构件悬挂在基板和反射镜之间。 此外，弹簧构件构造成在被反射镜偏转时存储能量，并且被配置为释放存储的能量以迫使反射镜进入另一位置。 所述至少一个相邻的微反射镜装置位于与所述反射镜相邻的所述基板上方并且被配置为悬挂所述弹簧构件。