发明申请
- 专利标题: Image input apparatus and inspection apparatus
- 专利标题(中): 图像输入装置和检查装置
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申请号: US11064014申请日: 2005-02-24
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公开(公告)号: US20050196059A1公开(公告)日: 2005-09-08
- 发明人: Hiromu Inoue , Tsuneo Terasawa , Shinichi Imai , Takehiko Nomura
- 申请人: Hiromu Inoue , Tsuneo Terasawa , Shinichi Imai , Takehiko Nomura
- 优先权: JP2004-048117 20040224
- 主分类号: G01B11/24
- IPC分类号: G01B11/24 ; G01N21/956 ; G06K9/36 ; G06T1/00 ; H01L21/66
摘要:
An image input apparatus for inputting an image of an object and outputting the image as an electric signal, the image input apparatus comprises a stage which supports the object, a laser interferometer which measures a position of the stage, a light source which emits a pulse light, an illumination optical system which irradiates the object with an illuminating light, a sensor which converts an image-formed optical image into an electric image signal, an imaging optical system which forms an image of the object on the sensor, a synchronization control circuit which controls a light-emission interval of the light source and synchronization of the sensor on the basis of position information of the laser interferometer, a light quantity monitor which measures a quantity of light, and a light quantity correction circuit which corrects the electric image signal on the basis of an output of the light quantity monitor.
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