发明申请
US20050200236A1 Method of fabricating an array of multi-electroded piezoelectric transducers for piezoelectric diaphragm structures 失效
制造用于压电隔膜结构的多电极压电换能器阵列的方法

Method of fabricating an array of multi-electroded piezoelectric transducers for piezoelectric diaphragm structures
摘要:
A circuit provides energy to a plurality of piezoelectric diaphragm structures formed in a two-dimensional array. Each piezoelectric diaphragm structure includes a piezoelectric element in operational contact with at least a first side electrode and a second side electrode. A switching system includes a first connection for a first power source, for application of power to the first side electrode and a second connection for a second power source, for application of power to the second side electrode. In a first state, power appropriate for performing a poling operation of the piezoelectric material is available for application to the first electrode, and the second electrode, and in a second state, power appropriate to activate the piezoelectric material to cause operational movement of the poled piezoelectric diaphragm structure is available for application to the first electrode and the second electrode.
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