发明申请
- 专利标题: Method of fabricating an array of multi-electroded piezoelectric transducers for piezoelectric diaphragm structures
- 专利标题(中): 制造用于压电隔膜结构的多电极压电换能器阵列的方法
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申请号: US11104887申请日: 2005-04-13
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公开(公告)号: US20050200236A1公开(公告)日: 2005-09-15
- 发明人: Steven Buhler , John Fitch , Meng Lean , Karl Littau
- 申请人: Steven Buhler , John Fitch , Meng Lean , Karl Littau
- 专利权人: PALO ALTO RESEARCH CENTER INCORPORATED.
- 当前专利权人: PALO ALTO RESEARCH CENTER INCORPORATED.
- 主分类号: B41J2/14
- IPC分类号: B41J2/14 ; B41J2/16 ; H01L41/09 ; H01L41/24
摘要:
A circuit provides energy to a plurality of piezoelectric diaphragm structures formed in a two-dimensional array. Each piezoelectric diaphragm structure includes a piezoelectric element in operational contact with at least a first side electrode and a second side electrode. A switching system includes a first connection for a first power source, for application of power to the first side electrode and a second connection for a second power source, for application of power to the second side electrode. In a first state, power appropriate for performing a poling operation of the piezoelectric material is available for application to the first electrode, and the second electrode, and in a second state, power appropriate to activate the piezoelectric material to cause operational movement of the poled piezoelectric diaphragm structure is available for application to the first electrode and the second electrode.
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