发明申请
- 专利标题： Carrier for holding an object to be polished
- 专利标题（中）： 用于保持要抛光的物体的载体
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申请号： US11074481申请日： 2005-03-08
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公开(公告)号： US20050202758A1公开(公告)日： 2005-09-15
- 发明人: Akira Yoshida , Toshikuni Shimizu
- 申请人： Akira Yoshida , Toshikuni Shimizu
- 优先权： JP2004-066013 20040309
- 主分类号： B24B37/20
- IPC分类号： B24B37/20 ; B24B37/24 ; B24B37/27 ; B24B37/28 ; H01L21/304 ; B24B1/00
摘要：
To provide a diamond-like carbon coated carrier for holding an object to be polished used for double-sided polishing, and a manufacturing method therefor. A carrier for holding an object to be polished according to the present invention has a substrate whose entire surface is coated with diamond-like carbon. A method of the present invention includes coating the entire carrier surface with diamond-like carbon using a surface coating apparatus using plasma CVD.
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