Methods and apparatuses for processing microfeature workpieces are disclosed herein. In one embodiment, a workpiece support carries a workpiece in a processing volume of a processing chamber. A first fluid delivery device directs an unsupported stream of a first fluid into the processing volume. A second fluid delivery device directs an unsupported stream of a second fluid into the processing volume. A first fluid collector receives at least a portion of the first fluid, and a second fluid collector receives at least a portion of the second fluid. Accordingly, embodiments of the apparatus support the use of multiple fluids in a single processing volume to control, restrict, and/or eliminate mixing between the two fluids while reducing and/or eliminating the need for purging and/or rinsing portions of the apparatus. The rotation rate and/or position of the workpiece can also be controlled to control the manner in which the fluids are collected.