公开(公告)号：US20050205111A1

公开(公告)日：2005-09-22

申请号：US11020018

申请日：2004-12-20

申请人： Thomas Ritzdorf ,  Dakin Fulton ,  Robert Batz ,  Kevin Witt ,  Kyle Hanson

发明人： Thomas Ritzdorf ,  Dakin Fulton ,  Robert Batz ,  Kevin Witt ,  Kyle Hanson

IPC分类号： C25D7/12 ,  H01L21/00 ,  B08B3/02

CPC分类号： C25D17/001 ,  H01L21/67051

摘要： Methods and apparatuses for processing microfeature workpieces are disclosed herein. In one embodiment, a workpiece support carries a workpiece in a processing volume of a processing chamber. A first fluid delivery device directs an unsupported stream of a first fluid into the processing volume. A second fluid delivery device directs an unsupported stream of a second fluid into the processing volume. A first fluid collector receives at least a portion of the first fluid, and a second fluid collector receives at least a portion of the second fluid. Accordingly, embodiments of the apparatus support the use of multiple fluids in a single processing volume to control, restrict, and/or eliminate mixing between the two fluids while reducing and/or eliminating the need for purging and/or rinsing portions of the apparatus. The rotation rate and/or position of the workpiece can also be controlled to control the manner in which the fluids are collected.

摘要翻译： 本文公开了微加工件的加工方法和装置。 在一个实施例中，工件支撑件在处理室的处理容积中承载工件。 第一流体输送装置将未支撑的第一流体流引导到处理体积中。 第二流体递送装置将未支撑的第二流体流引导到处理体积中。 第一流体收集器容纳第一流体的至少一部分，并且第二流体收集器容纳至少一部分第二流体。 因此，该设备的实施例支持在单个处理体积中使用多个流体来控制，限制和/或消除两种流体之间的混合，同时减少和/或消除对设备的清洗和/或漂洗部分的需要。 也可以控制工件的旋转速度和/或位置，以控制流体被收集的方式。

公开(公告)号：US5915665A

公开(公告)日：1999-06-29

申请号：US957890

申请日：1997-10-27

申请人： Andrew J. Paese ,  Lee Karsten ,  John Quella ,  Kevin Witt

发明人： Andrew J. Paese ,  Lee Karsten ,  John Quella ,  Kevin Witt

IPC分类号： E03C1/04 ,  E03C1/05 ,  F16K31/40 ,  F16K31/08

CPC分类号： F16K31/402 ,  E03C1/04 ,  E03C1/05

摘要： A pilot valve is operated by a solenoid formed by a coil wound around a non-magnetic spool that has a bore. A rare earth permanent magnet is inside the bore adjacent one end and abuts a flux concentrator farther inside the bore. A plunger is slidably located within the bore biased away from the flux concentrator by a spring and projects out another end of the bore. An enclosure of magnetic material completes a magnetic flux path around the solenoid and has an aperture though which the plunger projects. The pilot valve includes a cage of rigid non-magnetic material which abuts the enclosure and has a recess which supports the plunger out of contact with the housing. The plunger selectively opens and closes a pilot tube through the cage to operate a diaphragm the responds by engaging a primary valve seat to control the flow of fluid through a valve body.

摘要翻译： 导阀由螺线管操作，螺线管由缠绕在具有孔的非磁性线轴上的线圈组成。 稀土永磁体位于相邻一端的孔内，并在孔内更靠近集流器。 柱塞可滑动地定位在通过弹簧偏压离开集流器的孔内，并突出出孔的另一端。 磁性材料的外壳完成螺线管周围的磁通路径，并且具有柱塞突出的孔。 先导阀包括刚性非磁性材料笼，其邻接外壳并且具有支撑柱塞与壳体接触的凹部。 柱塞选择性地打开和关闭通过保持架的先导管以操作隔膜，通过接合主阀座来控制流体通过阀体的流动来进行响应。