发明申请
- 专利标题: Flood gun for charge neutralization
- 专利标题(中): 洪水枪用于中和电荷
-
申请号: US11071998申请日: 2005-03-04
-
公开(公告)号: US20050205800A1公开(公告)日: 2005-09-22
- 发明人: Bryan Barnard , Alan Bayly , Michael Humpherson
- 申请人: Bryan Barnard , Alan Bayly , Michael Humpherson
- 申请人地址: US MA Waltham
- 专利权人: Thermo Electron Corporation
- 当前专利权人: Thermo Electron Corporation
- 当前专利权人地址: US MA Waltham
- 优先权: GB0405091.0 20040305
- 主分类号: H01J37/02
- IPC分类号: H01J37/02 ; G01N23/00 ; H01J27/00
摘要:
A flood gun 10 for charge neutralization of an analysis region Ra of a sample S downstream of the flood gun, comprising: a first source 30 of electrons; a second source 50 of positively charged particles; and an extraction and focusing assembly 60,64, arranged to: (i) extract a first, electron beam from the first source and focus the first beam to a first flood area Ae at the analysis region; and (ii) extract a second, positive particle beam from the second source and focus the second beam to a second flood area Ai at the analysis region. The electron beam and the positive particle beam may both be extracted and focused simultaneously, in a single mode of operation or, alternately, in a dual mode of operation. A corresponding method of providing charge neutralization and a spectroscopic system for secondary particle emission analysis are disclosed.
公开/授权文献
- US07067821B2 Flood gun for charge neutralization 公开/授权日:2006-06-27
信息查询