Invention Application
- Patent Title: Flood gun for charge neutralization
- Patent Title (中): 洪水枪用于中和电荷
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Application No.: US11071998Application Date: 2005-03-04
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Publication No.: US20050205800A1Publication Date: 2005-09-22
- Inventor: Bryan Barnard , Alan Bayly , Michael Humpherson
- Applicant: Bryan Barnard , Alan Bayly , Michael Humpherson
- Applicant Address: US MA Waltham
- Assignee: Thermo Electron Corporation
- Current Assignee: Thermo Electron Corporation
- Current Assignee Address: US MA Waltham
- Priority: GB0405091.0 20040305
- Main IPC: H01J37/02
- IPC: H01J37/02 ; G01N23/00 ; H01J27/00

Abstract:
A flood gun 10 for charge neutralization of an analysis region Ra of a sample S downstream of the flood gun, comprising: a first source 30 of electrons; a second source 50 of positively charged particles; and an extraction and focusing assembly 60,64, arranged to: (i) extract a first, electron beam from the first source and focus the first beam to a first flood area Ae at the analysis region; and (ii) extract a second, positive particle beam from the second source and focus the second beam to a second flood area Ai at the analysis region. The electron beam and the positive particle beam may both be extracted and focused simultaneously, in a single mode of operation or, alternately, in a dual mode of operation. A corresponding method of providing charge neutralization and a spectroscopic system for secondary particle emission analysis are disclosed.
Public/Granted literature
- US07067821B2 Flood gun for charge neutralization Public/Granted day:2006-06-27
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