公开(公告)号：US20130180844A1

公开(公告)日：2013-07-18

申请号：US13823499

申请日：2011-10-10

申请人： Bryan Barnard

发明人： Bryan Barnard

IPC分类号： H01J37/08

CPC分类号： H01J37/08 ,  H01J27/026 ,  H01J37/05 ,  H01J37/3171 ,  H01J49/142 ,  H01J2237/057 ,  H01J2237/0812 ,  H01J2237/0827

摘要： A method of processing one or more surfaces is provided, comprising: providing a switchable ion gun which is switchable between a cluster mode setting for producing an ion beam substantially comprising ionised gas clusters for irradiating a surface and an atomic mode setting for producing an ion beam substantially comprising ionised gas atoms for irradiating a surface; and selectively operating the ion gun in the cluster mode by mass selecting ionised gas clusters using a variable mass selector thereby irradiating a surface substantially with ionised gas clusters or the atomic mode by mass selecting ionised gas atoms using a variable mass selector thereby irradiating a surface substantially with ionised gas atoms. Also provided is a switchable ion gun comprising: a gas expansion nozzle for producing gas clusters; an ionisation chamber for ionising the gas clusters and gas atoms; and a variable (preferably a magnetic sector) mass selector for mass selecting the ionised gas clusters and ionised gas atoms to produce an ion beam variable between substantially comprising ionised gas clusters and substantially comprising ionised gas atoms. Preferably, the gun comprises an electrically floating flight tube for adjusting the energy of the ions whilst within the mass selector.

摘要翻译： 提供一种处理一个或多个表面的方法，包括：提供可切换离子枪，其可在用于产生基本上包括用于照射表面的电离气体簇的离子束的簇模式设置和用于产生离子束的原子模式设置之间切换 基本上包括用于照射表面的电离气体原子; 并且通过使用可变质量选择器质量选择电离气体簇来选择性地操作离子枪，从而通过使用可变质量选择器大量选择电离气体原子而基本上用电离气体簇或原子模式照射表面，从而基本上照射表面 具有电离气体原子。 还提供了一种可切换离子枪，包括：用于产生气体团的气体膨胀喷嘴; 用于电离气团和气原子的电离室; 以及用于质量选择电离气体团簇和电离气体原子以产生基本上包含电离气体簇并且基本上包含电离气体原子的离子束可变的变量（优选磁性扇区）质量选择器。 优选地，枪包括电浮动飞行管，用于在质量选择器内调节离子的能量。

公开(公告)号：US08164066B2

公开(公告)日：2012-04-24

申请号：US12837857

申请日：2010-07-16

申请人： Bryan Barnard ,  Christopher Glenister

发明人： Bryan Barnard ,  Christopher Glenister

IPC分类号： H01J37/145 ,  H01J37/14 ,  G21K5/10

CPC分类号： H01J37/141 ,  H01J37/023 ,  H01J37/21 ,  H01J37/285 ,  H01J2237/1405

摘要： The invention provides a magnetic lens for generating a magnetic imaging field to focus charged particles emitted from a sample, the lens comprising a central pole piece and an outer pole piece disposed about the central pole piece, wherein the lens comprises a magnetic moveable element for movement relative to at least one of the pole pieces, whereby a focal length of the lens is variable by said movement of the magnetic moveable element, thereby enabling a zoom facility for changing the magnification of an image. The movement of the moveable element preferably changes the magnetic circuit between the pole pieces. Also provided is a method of focusing charged particles emitted from a sample and a charged particle energy analyzer, such as an imaging photoelectron spectroscopy system.

摘要翻译： 本发明提供一种用于产生磁成像场的磁透镜，用于聚焦从样品发射的带电粒子，所述透镜包括中心极片和设置在中心极片周围的外极片，其中所述透镜包括用于移动的磁性可移动元件 相对于极片中的至少一个，由此通过所述磁性可移动元件的移动可以使透镜的焦距变化，由此实现用于改变图像的放大率的变焦设备。 可移动元件的移动优选地改变极片之间的磁路。 还提供了一种聚焦从样品发射的带电粒子和带电粒子能量分析仪（诸如成像光电子能谱系统）的方法。

公开(公告)号：US20110012018A1

公开(公告)日：2011-01-20

申请号：US12837857

申请日：2010-07-16

申请人： Bryan BARNARD ,  Christopher Glenister

发明人： Bryan BARNARD ,  Christopher Glenister

IPC分类号： H01J37/141 ,  H01J47/00 ,  G01N23/22

CPC分类号： H01J37/141 ,  H01J37/023 ,  H01J37/21 ,  H01J37/285 ,  H01J2237/1405

摘要： The invention provides a magnetic lens for generating a magnetic imaging field to focus charged particles emitted from a sample, the lens comprising a central pole piece and an outer pole piece disposed about the central pole piece, wherein the lens comprises a magnetic moveable element for movement relative to at least one of the pole pieces, whereby a focal length of the lens is variable by said movement of the magnetic moveable element, thereby enabling a zoom facility for changing the magnification of an image. The movement of the moveable element preferably changes the magnetic circuit between the pole pieces. Also provided is a method of focusing charged particles emitted from a sample and a charged particle energy analyzer, such as an imaging photoelectron spectroscopy system.

摘要翻译： 本发明提供一种用于产生磁成像场的磁透镜，用于聚焦从样品发射的带电粒子，所述透镜包括中心极片和设置在中心极片周围的外极片，其中所述透镜包括用于移动的磁性可移动元件 相对于极片中的至少一个，由此通过所述磁性可移动元件的移动可以使透镜的焦距变化，由此实现用于改变图像的放大率的变焦设备。 可移动元件的移动优选地改变极片之间的磁路。 还提供了一种聚焦从样品发射的带电粒子和带电粒子能量分析仪（诸如成像光电子能谱系统）的方法。

公开(公告)号：US6104029A

公开(公告)日：2000-08-15

申请号：US139198

申请日：1998-08-25

申请人： Peter Coxon ,  Bryan Barnard ,  H. Sebastian Von Harrach

发明人： Peter Coxon ,  Bryan Barnard ,  H. Sebastian Von Harrach

IPC分类号： H01J49/40 ,  H01J47/00

CPC分类号： H01J49/46 ,  G01N23/2273 ,  H01J49/067 ,  G01N2223/085

摘要： A spectrometer and method of spectroscopy are provided for surface analysis. The spectrometer comprises an energy analyser for analysing the energies of charged particles liberated from a sample, a lens arranged to project a diffraction image of the analysis area at the image plane of the lens and a detector for detecting the charged particles. The analyser and lens are arranged to generate an image at the detector in which the charged particles are distributed along a first direction according to their emission angles and are distributed along another direction according to their energies. The detector is arranged to detect the distribution of charged particles in the image along the first direction to provide angle resolved energy spectra.

摘要翻译： 提供光谱仪和光谱学方法进行表面分析。 光谱仪包括用于分析从样品释放的带电粒子的能量的能量分析器，布置成在透镜的像面投影分析区域的衍射图像的透镜和用于检测带电粒子的检测器。 分析器和透镜被布置成在检测器处产生图像，其中带电粒子根据其发射角沿第一方向分布，并且根据其能量沿另一方向分布。 检测器设置成沿着第一方向检测图像中带电粒子的分布，以提供角度分辨的能谱。

公开(公告)号：US09478388B2

公开(公告)日：2016-10-25

申请号：US13823499

申请日：2011-10-10

申请人： Bryan Barnard

发明人： Bryan Barnard

IPC分类号： H01J37/08 ,  H01J27/02 ,  H01J49/14 ,  H01J37/05 ,  H01J37/317

CPC分类号： H01J37/08 ,  H01J27/026 ,  H01J37/05 ,  H01J37/3171 ,  H01J49/142 ,  H01J2237/057 ,  H01J2237/0812 ,  H01J2237/0827

摘要： A method of processing one or more surfaces is provided, comprising: providing a switchable ion gun which is switchable between a cluster mode setting for producing an ion beam substantially comprising ionized gas clusters for irradiating a surface and an atomic mode setting for producing an ion beam substantially comprising ionized gas atoms for irradiating a surface; and selectively operating the ion gun in the cluster mode by mass selecting ionized gas clusters using a variable mass selector thereby irradiating a surface substantially with ionized gas clusters or the atomic mode by mass selecting ionized gas atoms using a variable mass selector thereby irradiating a surface substantially with ionized gas atoms. Also provided is a switchable ion gun comprising: a gas expansion nozzle for producing gas clusters; an ionization chamber for ionizing the gas clusters and gas atoms; and a variable (preferably a magnetic sector) mass selector for mass selecting the ionized gas clusters and ionized gas atoms to produce an ion beam variable between substantially comprising ionized gas clusters and substantially comprising ionized gas atoms. Preferably, the gun comprises an electrically floating flight tube for adjusting the energy of the ions while within the mass selector.

摘要翻译： 提供一种处理一个或多个表面的方法，包括：提供可切换离子枪，其可在用于产生基本上包括用于照射表面的电离气体簇的离子束的簇模式设置和用于产生离子束的原子模式设置之间切换 基本上包括用于照射表面的电离气体原子; 并且通过使用可变质量选择器大量选择离子化气体簇来选择性地操作离子枪，由此通过使用可变质量选择器大量选择电离气体原子，基本上用离子化气体簇或原子模式照射表面，从而基本上照射表面 与电离气体原子。 还提供了一种可切换离子枪，包括：用于产生气体团的气体膨胀喷嘴; 用于电离气团和气原子的电离室; 以及用于质量选择电离气体团簇和离子化气体原子以产生基本上包括电离气体簇并且基本上包含电离气体原子的离子束可变的变量（优选磁性扇形体）选择器。 优选地，枪包括电浮动飞行管，用于在质量选择器内调节离子的能量。

公开(公告)号：US20050205800A1

公开(公告)日：2005-09-22

申请号：US11071998

申请日：2005-03-04

申请人： Bryan Barnard ,  Alan Bayly ,  Michael Humpherson

发明人： Bryan Barnard ,  Alan Bayly ,  Michael Humpherson

IPC分类号： H01J37/02 ,  G01N23/00 ,  H01J27/00

CPC分类号： H01J37/026 ,  H01J2237/0044 ,  H01J2237/06308 ,  H01J2237/0807 ,  H01J2237/082 ,  H01J2237/2516

摘要： A flood gun 10 for charge neutralization of an analysis region Ra of a sample S downstream of the flood gun, comprising: a first source 30 of electrons; a second source 50 of positively charged particles; and an extraction and focusing assembly 60,64, arranged to: (i) extract a first, electron beam from the first source and focus the first beam to a first flood area Ae at the analysis region; and (ii) extract a second, positive particle beam from the second source and focus the second beam to a second flood area Ai at the analysis region. The electron beam and the positive particle beam may both be extracted and focused simultaneously, in a single mode of operation or, alternately, in a dual mode of operation. A corresponding method of providing charge neutralization and a spectroscopic system for secondary particle emission analysis are disclosed.

摘要翻译： 用于对洪水枪下游的样品S的分析区域R a a进行电荷中和的喷枪10，包括：电子的第一源30; 带正电的颗粒的第二源50; 以及提取和聚焦组件60,64，其布置成：（i）从第一源提取第一电子束，并将第一光束聚焦到分析区域处的第一泛洪区域A 1; 和（ii）从第二源提取第二个正的粒子束，并将第二个光束聚焦到分析区域的第二个洪泛区域A 1。 电子束和正粒子束可以在单一操作模式中或者以双重操作模式同时被提取和聚焦。 公开了提供电荷中和的相应方法和用于二次粒子发射分析的光谱系统。

公开(公告)号：US20150014275A1

公开(公告)日：2015-01-15

申请号：US13941708

申请日：2013-07-15

申请人： Bryan BARNARD

发明人： Bryan BARNARD

IPC分类号： H01J37/08

CPC分类号： H01J37/08 ,  H01J2237/006 ,  H01J2237/057 ,  H01J2237/0812 ,  H01J2237/0827

摘要： A switchable ion gun switchable between a cluster mode setting for producing an ion beam substantially comprising ionised gas clusters and an atomic mode setting for producing an ion beam substantially comprising ionised gas atoms, comprising: a source chamber having a first gas inlet; a gas expansion nozzle for producing gas clusters in the presence of gas atoms by expansion of a gas from the source chamber through the nozzle; an ionisation chamber for ionising the gas clusters and gas atoms; wherein the ionisation chamber has a second gas inlet for admitting gas directly into the ionisation chamber to form ionised gas atoms; and a variable mass selector for mass selecting the ionised gas clusters and ionised gas atoms to produce an ion beam variable between substantially comprising ionised gas clusters and substantially comprising ionised gas atoms.

摘要翻译： 一种可切换的离子枪，其可在用于产生基本上包含电离气体团的离子束的簇模式设置和用于产生基本上包含电离气体原子的离子束的原子模式设置之间切换，包括：源室，具有第一气体入口; 气体膨胀喷嘴，用于通过从源室通过喷嘴膨胀气体而在气体存在的情况下产生气体团; 用于电离气团和气原子的电离室; 其中所述电离室具有用于将气体直接引入所述电离室中以形成电离气体原子的第二气体入口; 以及可变质量选择器，用于质量选择电离气体团簇和电离气体原子，以产生基本上包含电离气体团簇并且基本上包含电离气体原子的离子束可变。

公开(公告)号：US08993982B2

公开(公告)日：2015-03-31

申请号：US13941708

申请日：2013-07-15

申请人： Bryan Barnard

发明人： Bryan Barnard

IPC分类号： H01J49/10 ,  H01J27/02 ,  H01J23/06 ,  H01J37/317 ,  H01J37/08

CPC分类号： H01J37/08 ,  H01J2237/006 ,  H01J2237/057 ,  H01J2237/0812 ,  H01J2237/0827

摘要： A switchable ion gun switchable between a cluster mode setting for producing an ion beam substantially comprising ionised gas clusters and an atomic mode setting for producing an ion beam substantially comprising ionised gas atoms, comprising: a source chamber having a first gas inlet; a gas expansion nozzle for producing gas clusters in the presence of gas atoms by expansion of a gas from the source chamber through the nozzle; an ionisation chamber for ionising the gas clusters and gas atoms; wherein the ionisation chamber has a second gas inlet for admitting gas directly into the ionisation chamber to form ionised gas atoms; and a variable mass selector for mass selecting the ionised gas clusters and ionised gas atoms to produce an ion beam variable between substantially comprising ionised gas clusters and substantially comprising ionised gas atoms.

摘要翻译： 一种可切换的离子枪，其可在用于产生基本上包含电离气体团的离子束的簇模式设置和用于产生基本上包含电离气体原子的离子束的原子模式设置之间切换，包括：源室，具有第一气体入口; 气体膨胀喷嘴，用于通过从源室通过喷嘴膨胀气体而在气体存在的情况下产生气体团; 用于电离气团和气原子的电离室; 其中所述电离室具有用于将气体直接引入所述电离室中以形成电离气体原子的第二气体入口; 以及可变质量选择器，用于质量选择电离气体团簇和电离气体原子，以产生基本上包含电离气体团簇并且基本上包含电离气体原子的离子束可变。

公开(公告)号：US20070115468A1

公开(公告)日：2007-05-24

申请号：US11588689

申请日：2006-10-27

申请人： Bryan Barnard

发明人： Bryan Barnard

IPC分类号： G01J3/00

CPC分类号： H01J37/29 ,  H01J37/228 ,  H01J37/252

摘要： A spectrometer (10) for sample surface analysis by irradiation of the surface by primary particles and a corresponding method of surface analysis spectroscopy. The spectrometer (10) provides sample viewing and secondary charged particle collection substantially normal to the sample surface. A collection chamber (22) comprises a secondary charged particle lens arrangement (20) to focus the emitted particles in a downstream direction along a first normal axis (24) and thereby to define a charged particle optical crossover location (25); and a light-reflecting optical element (50) downstream of the lens arrangement and arranged to receive image light (41) and reflect it away from a second normal axis (42) for providing a viewable image of the surface. The optical element (50) is positioned at, or near to, the crossover location (25) and comprises an opening (52) therethrough, such that the focused particles pass through the opening for downstream spectroscopic analysis substantially without obstruction by the optical element.

摘要翻译： 用于通过初级粒子照射表面进行样品表面分析的光谱仪（10）和相应的表面分析光谱法。 光谱仪（10）提供基本上垂直于样品表面的样品观察和二次带电粒子收集。 收集室（22）包括二次带电粒子透镜装置（20），以沿着第一法线轴线（24）沿下游方向聚焦发射的颗粒，从而限定带电粒子光学交叉位置（25）; 以及在所述透镜装置的下游的光反射光学元件（50），并被布置成接收图像光（41）并将其反射离开第二法线轴（42），以提供所述表面的可视图像。 光学元件（50）位于交叉位置（25）处或附近，并且包括通过其的开口（52），使得聚焦的微粒基本上不受光学元件的阻碍而穿过开口进行下游光谱分析。