发明申请
- 专利标题： Diffusion device and method of diffusing
- 专利标题（中）： 扩散装置和扩散方法
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申请号： US11131718申请日： 2005-05-18
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公开(公告)号： US20050205916A1公开(公告)日： 2005-09-22
- 发明人: Simon Conway , Thomas Jaworski , Heather Schramm , Scott Walter , Jeffrey Crull , Lawrence Fenske , Jonathan Mick
- 申请人： Simon Conway , Thomas Jaworski , Heather Schramm , Scott Walter , Jeffrey Crull , Lawrence Fenske , Jonathan Mick
- 主分类号： A61L9/03
- IPC分类号： A61L9/03 ; A61L9/12 ; A61L9/14 ; A63H33/40 ; B05B12/04 ; B05B17/06 ; H01L27/108
摘要：
A diffusion device comprises a bottom portion having a bottom cover disposed thereon. The device further includes a top portion having a top cover disposed atop the bottom portion and a pump assembly disposed between the top cover and the bottom cover. First, second, and third arm portions extend from the pump assembly, wherein the first, second, and third arm portions include first, second, and third piezoelectric devices, respectively, attached thereto.
公开/授权文献
- US07469844B2 Diffusion device and method of diffusing 公开/授权日：2008-12-30
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