发明申请
- 专利标题: Optical displacement measurement device
- 专利标题(中): 光学位移测量装置
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申请号: US11080907申请日: 2005-03-15
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公开(公告)号: US20050206905A1公开(公告)日: 2005-09-22
- 发明人: Tadashi Iwamoto , Yoshihisa Tanimura
- 申请人: Tadashi Iwamoto , Yoshihisa Tanimura
- 申请人地址: JP Kawasaki 213-0012
- 专利权人: Mitutoyo Corporation
- 当前专利权人: Mitutoyo Corporation
- 当前专利权人地址: JP Kawasaki 213-0012
- 优先权: JP2004-078886 20040318
- 主分类号: G01B11/00
- IPC分类号: G01B11/00 ; G01B11/02 ; G01C3/02 ; G01C3/06 ; G01C3/08 ; G01S7/481 ; G01B9/02
摘要:
An optical displacement measurement device for introducing light from a light source to an object through an optical system having an objective lens and for detecting light reflected from the object by a detection section to thereby measure a displacement of the object relative to the objective lens. In the optical displacement measurement device, the objective lens is a conical lens for advancing the light toward the object and for receiving light reflected from the object to direct to the detection section, and the displacement of the object relative to the objective lens is measured in consideration of the property that a shape of an detected image detected by the detection section varies depending on the displacement of the object relative to the objective lens.
公开/授权文献
- US07330278B2 Optical displacement measurement device 公开/授权日:2008-02-12
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