发明申请
US20050206905A1 Optical displacement measurement device 有权
光学位移测量装置

Optical displacement measurement device
摘要:
An optical displacement measurement device for introducing light from a light source to an object through an optical system having an objective lens and for detecting light reflected from the object by a detection section to thereby measure a displacement of the object relative to the objective lens. In the optical displacement measurement device, the objective lens is a conical lens for advancing the light toward the object and for receiving light reflected from the object to direct to the detection section, and the displacement of the object relative to the objective lens is measured in consideration of the property that a shape of an detected image detected by the detection section varies depending on the displacement of the object relative to the objective lens.
公开/授权文献
信息查询
0/0