发明申请
- 专利标题: Multi-zone reflecting device for use in flash lamp processes
- 专利标题(中): 用于闪光灯工艺的多区域反射装置
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申请号: US10815068申请日: 2004-03-26
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公开(公告)号: US20050211697A1公开(公告)日: 2005-09-29
- 发明人: Karson Knutson , Jack Hwang
- 申请人: Karson Knutson , Jack Hwang
- 主分类号: F27B5/14
- IPC分类号: F27B5/14 ; F27B17/00 ; F27D11/00 ; H01L21/00
摘要:
A method, apparatus, and system including a reflecting device having a plurality of reflecting zones with associated reflectivities for reflecting light from a flash lamp, are described herein.