发明申请
- 专利标题: Horizontal MOS transistor
- 专利标题(中): 水平MOS晶体管
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申请号: US10911630申请日: 2004-08-05
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公开(公告)号: US20050212012A1公开(公告)日: 2005-09-29
- 发明人: Shinichiro Suga , Takumi Kawai
- 申请人: Shinichiro Suga , Takumi Kawai
- 申请人地址: JP Kawasaki
- 专利权人: FUJITSU LIMITED
- 当前专利权人: FUJITSU LIMITED
- 当前专利权人地址: JP Kawasaki
- 优先权: JP2004-085937 20040324
- 主分类号: H01L29/78
- IPC分类号: H01L29/78 ; H01L23/482 ; H01L29/06 ; H01L29/417 ; H01L29/423 ; H01L29/73
摘要:
This invention provides a horizontal MOS transistor capable of improving current drivability and reducing ON resistance by optimizing the gate wiring structure and the disposition structure of source/drain layers. First gate wirings are disposed in the X direction at a pitch Y1 in the Y direction and second gate wirings 12 are disposed in the Y direction with two pieces as a pair such that they meander at a pitch X1 in the X direction. The meandering of the second gate wiring 12 is formed so as to sandwich the bent portions 14 substantially in the center of the pitch Y1. A bottle-like shape diffusion layer region in which the wide-width region and narrow-width region are combined is sectioned by adjacent first and second wirings. A contact 16 for connecting the diffusion layer region to the wiring layer 18 is disposed in the wide-width region and wiring layers 18 are disposed such that two rows run in parallel in the X direction. A diffusion layer region is a different electrode region from diffusion layer regions adjacent on four sides thereby forming a MOS transistor. Consequently, a horizontal MOS transistor excellent in current drivability for each unit region and having a slight ON resistance is constructed.
公开/授权文献
- US07075159B2 Horizontal MOS transistor 公开/授权日:2006-07-11
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