Invention Application
US20050215162A1 Plasma display panel producing method, and plasma display panel 失效
等离子显示面板制作方法和等离子显示面板

  • Patent Title: Plasma display panel producing method, and plasma display panel
  • Patent Title (中): 等离子显示面板制作方法和等离子显示面板
  • Application No.: US10511750
    Application Date: 2004-02-23
  • Publication No.: US20050215162A1
    Publication Date: 2005-09-29
  • Inventor: Daisuke Adachi
  • Applicant: Daisuke Adachi
  • Priority: JP2003-052851 20030228
  • International Application: PCT/JP04/02066 WO 20040223
  • Main IPC: H01J11/44
  • IPC: H01J11/44 G03F1/00 G03F7/20 H01J9/02 H01J9/00
Plasma display panel producing method, and plasma display panel
Abstract:
The present invention provides a method of manufacturing a PDP that prevents a defect from occurring in a structure of the PDP; and also suppresses retroflexion, exfoliation, and the like, of the structure. In photolithography, exposure is performed twice with a first and a second photomasks, each having a different aperture width, but the same exposure pattern. The amount of exposure is different between first exposure region (A′) through the first photomask; and second exposure region (B′) through the second photomask.
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