发明申请
- 专利标题： Integrated circuit with intergrated capacitor and methods for making same
- 专利标题（中）： 具有集成电容器的集成电路及其制造方法
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申请号： US10513057申请日： 2003-03-17
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公开(公告)号： US20050224908A1公开(公告)日： 2005-10-13
- 发明人: Hans-Joachim Barth
- 申请人： Hans-Joachim Barth
- 优先权： DE10219116.6 20020429
- 国际申请： PCT/DE03/00862 WO 20030317
- 主分类号： H01L21/768
- IPC分类号： H01L21/768 ; H01L21/822 ; H01L23/522 ; H01L27/04 ; H01L29/00
摘要：
An explanation is given of, inter alia, a circuit arrangement in which an intermediate layer (160) made of a dielectric material is arranged between two metal layers (102 and 104). The intermediate layer (160) is designed in such a way that the capacitance per unit area between the connection layers (102, 104) is greater than 0.5 fF/μm2.