Invention Application
US20050231851A1 Manufacturing method of magnetic head slider, magnetic head slider and magnetic device
审中-公开
磁头滑块,磁头滑块和磁性装置的制造方法
- Patent Title: Manufacturing method of magnetic head slider, magnetic head slider and magnetic device
- Patent Title (中): 磁头滑块,磁头滑块和磁性装置的制造方法
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Application No.: US11085051Application Date: 2005-03-22
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Publication No.: US20050231851A1Publication Date: 2005-10-20
- Inventor: Kazuhiro Yoshida , Jun Ito , Kan Takahashi , Mitsunobu Hanyu
- Applicant: Kazuhiro Yoshida , Jun Ito , Kan Takahashi , Mitsunobu Hanyu
- Applicant Address: JP Tokyo
- Assignee: KABUSHIKI KAISHA TOSHIBA
- Current Assignee: KABUSHIKI KAISHA TOSHIBA
- Current Assignee Address: JP Tokyo
- Priority: JPJP2004-098526 20040330
- Main IPC: C23F1/04
- IPC: C23F1/04 ; G11B5/187 ; G11B5/60 ; G11B21/21

Abstract:
A manufacturing method of a magnetic head slider 5 is to perform milling processes for at least three times to a slider main body 50 to form a flying surface, and thereby, the milling process is performed at variety of depths more than the number of milling processes. These three times milling process composed of: for example, a first milling processes forming a first mask on the slider main body 50 and performing a milling at a first depth; a second milling process changing the first mask to a second mask and performing the milling at a second depth, after the first milling process; and a third milling process changing the second mask to a third mask and performing the milling at a third depth, after the second milling process. Namely, a cycle of the masking, the milling, and a removal of the mask is performed three cycles, and thereby, milling surfaces with at least four varieties of heights or more can be formed easily.
Information query
IPC分类: