发明申请
US20050232130A1 Production method for photoresist master, production method for optical recording medium-producing stamper, stamper, phtoresist master, stamper intermediate element and optical recroding medium
审中-公开
光致抗蚀剂母版的制造方法，光记录介质制造用模具的制造方法，压模，雕刻母版，压模中间元件和光学重绘介质
- 专利标题： Production method for photoresist master, production method for optical recording medium-producing stamper, stamper, phtoresist master, stamper intermediate element and optical recroding medium
- 专利标题（中）： 光致抗蚀剂母版的制造方法，光记录介质制造用模具的制造方法，压模，雕刻母版，压模中间元件和光学重绘介质
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申请号： US10515404申请日： 2003-05-30
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公开(公告)号： US20050232130A1公开(公告)日： 2005-10-20
- 发明人: Hisaji Oyake , Hiroaki Takahata , Kenji Shirasuna
- 申请人： Hisaji Oyake , Hiroaki Takahata , Kenji Shirasuna
- 申请人地址： JP Tokyo
- 专利权人： TDK CORPORATION
- 当前专利权人： TDK CORPORATION
- 当前专利权人地址： JP Tokyo
- 优先权： JP2002-164019 20020605
- 国际申请： PCT/JP03/06861 WO 20030530
- 主分类号： G11B7/24
- IPC分类号： G11B7/24 ; G03F7/00 ; G11B7/26
摘要：
A stamper (36) used for fabricating an optical recording medium is fabricated by forming a convexo-concave pattern (22) without development of a photoresist layer (16). A fabrication method of the stamper used for fabricating an optical recording medium includes: forming a light-absorbing layer (14) and the photoresist layer (16) on a glass substrate (10); forming the convexo-concave pattern (22) of undeveloped photoresist by irradiating the photoresist layer (16) with laser light from a surface of the photoresist layer that is opposite to the light-absorbing layer (14) so as to remove a part of the photoresist layer by energy of the laser light, thereby fabricating a photoresist master (26); forming a metal thin layer (28) on the convexo-concave pattern (22) in the photoresist master (26); forming a metal layer (30) on the metal thin layer (28) by electro-plating; and forming the stamper (36) by separating the metal thin layer (28) and the metal layer (30) from the photoresist master (26).
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