发明申请
- 专利标题: Displacement sensor
- 专利标题(中): 位移传感器
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申请号: US11075332申请日: 2005-03-09
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公开(公告)号: US20050241364A1公开(公告)日: 2005-11-03
- 发明人: Motohiro Fujiyoshi , Yutaka Nonomura , Hisayoshi Sugihara
- 申请人: Motohiro Fujiyoshi , Yutaka Nonomura , Hisayoshi Sugihara
- 申请人地址: JP Aichi-gun JP Toyota-shi
- 专利权人: KABUSHIKI KAISHA TOYOTA CHUO KENKYUSHO,TOYOTA JIDOSHA KABUSHIKI KAISHA
- 当前专利权人: KABUSHIKI KAISHA TOYOTA CHUO KENKYUSHO,TOYOTA JIDOSHA KABUSHIKI KAISHA
- 当前专利权人地址: JP Aichi-gun JP Toyota-shi
- 优先权: JP2004-067555 20040310
- 主分类号: G01B3/30
- IPC分类号: G01B3/30 ; G01B21/00 ; G01P15/08 ; G01P15/125 ; G01P21/00
摘要:
A structure is presented in which it is easy to adjust, to a determined value, distance between electrodes of a condenser formed in an electrostatic capacity-type displacement sensor. A displacement sensor has a conductive lower layer, an insulating layer stacked on the conductive lower layer and a conductive upper layer stacked on the insulating layer. The conductive lower layer is divided into a first lower region and a second lower region by a groove penetrating the conductive lower layer. The insulating layer is stacked on the conductive lower layer at selected portions. The conductive upper layer is stacked on the insulating layer at selected portions. The conductive upper layer has a beam connected via the insulating layer to the first lower region and the second lower region at a pair of ends of the beam. The conductive upper layer has a first upper portion forming one of electrodes of a first condenser. The first upper portion extends from a position above the first lower region to a position above the second lower region. The insulating layer is not formed between the first upper portion and the first lower region, but is formed between the first upper portion and the second lower region.
公开/授权文献
- US07501835B2 Displacement sensor 公开/授权日:2009-03-10
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