发明申请
- 专利标题: Metal-assisted DBRs for thermal management in VCSELS
- 专利标题(中): 金属辅助DBRs用于VCSELS中的热管理
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申请号: US11026161申请日: 2004-12-30
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公开(公告)号: US20050243890A1公开(公告)日: 2005-11-03
- 发明人: Jin Kim , Tzu-Yu Wang , Gyoungwon Park
- 申请人: Jin Kim , Tzu-Yu Wang , Gyoungwon Park
- 主分类号: H01S3/08
- IPC分类号: H01S3/08 ; H01S5/02 ; H01S5/024 ; H01S5/042 ; H01S5/183 ; H01S5/343
摘要:
A VCSEL includes a substrate having a partially removed portion; a metal-assisted DBR having a metal layer and a first mirror stack, wherein the metal layer is located at the partially removed portion of the substrate; an active region having a plurality of quantum wells over the metal-assisted DBR; and a second mirror stack over the active region, wherein a number of alternating layers of the first mirror stack is substantially smaller than a number typically required for a VCSEL without the integrated metal reflector. Such a metal-assisted DBR is especially useful for a long-wavelength VCSEL on a InP substrate or a red-color VCSEL on a GaAs substrate.
公开/授权文献
- US07860143B2 Metal-assisted DBRs for thermal management in VCSELs 公开/授权日:2010-12-28
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