发明申请
- 专利标题: Positive-tone radiation-sensitive resin composition
- 专利标题(中): 正色辐射敏感树脂组合物
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申请号: US11117344申请日: 2005-04-29
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公开(公告)号: US20050244747A1公开(公告)日: 2005-11-03
- 发明人: Tomoki Nagai , Takayuki Tsuji
- 申请人: Tomoki Nagai , Takayuki Tsuji
- 优先权: JP2004-135912 20040430
- 主分类号: G03F7/004
- IPC分类号: G03F7/004 ; G03C1/492 ; G03F7/039 ; G03F7/20 ; H01L21/027
摘要:
A positive-tone radiation-sensitive resin composition comprising: (A) a carbazole derivative shown by the following formula (1), (B) a photoacid generator containing a sulfonimide compound and an iodonium salt compound as essential components, and (C) an acid-dissociable group-containing resin which is insoluble or scarcely soluble in alkali, but becomes soluble in alkali when the acid-dissociable group dissociates is disclosed. wherein R1 and R2 are individually halogen atom, methyl, cyano, or nitro group, X is a C1-20 organic group, and h and i are 0-4. The resin composition is useful as a chemically amplified positive-tone resist excelling in focal depth allowance, sensitivity, resolution, pattern profile, and PED stability.
公开/授权文献
- US07258962B2 Positive-tone radiation-sensitive resin composition 公开/授权日:2007-08-21
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