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发明申请
US20050247341A1 System for supplying halogen gas or halogen containing gas and method thereof 有权
用于提供卤素气体或含卤素气体的系统及其方法

System for supplying halogen gas or halogen containing gas and method thereof
摘要：
Since the system for supplying gas comprises a storage container, a compressor which pressurizes fluorine gas in the storage container, and a pressurized storing container which presses fit and stores the fluorine gas, by supplying fluorine gas or the like to the destination from this system for supplying gas, it is not necessary to change gas source such as a gas cylinder or the like. In this way, fluorine gas or the like can be supplied to the destination inexpensively and safely.
摘要（中）：

由于用于供给气体的系统包括储存容器，对储存容器中的氟气进行加压的压缩机和通过从该系统向目的地供应氟气等而压入和储存氟气的加压储存容器， 供给气体时，不需要改变气瓶等气体源。 这样，能够廉价，安全地向目的地供给氟气等。

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