发明申请
- 专利标题: Thermal sensing with bridge circuitry
- 专利标题(中): 具有桥接电路的热感测
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申请号: US11167612申请日: 2005-06-27
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公开(公告)号: US20050254994A1公开(公告)日: 2005-11-17
- 发明人: Alan Bell , Richard Bruce , Eric Peeters , Michal Wolkin , Dirk Bruyker
- 申请人: Alan Bell , Richard Bruce , Eric Peeters , Michal Wolkin , Dirk Bruyker
- 专利权人: Palo Alto Research Center Incorporated
- 当前专利权人: Palo Alto Research Center Incorporated
- 主分类号: G01F1/68
- IPC分类号: G01F1/68 ; G01K1/00 ; G01K7/30 ; G01K17/00 ; G01N25/20 ; G01N25/48 ; G01N27/00
摘要:
Thermal sensing devices can include two subsets of thermal sensors connected in a bridge by circuitry on the same support layer or surface with the sensors. Each thermal sensor can be formed in a patterned layer of semiconductor material, and the bridge circuitry can include leads formed in a patterned layer of conductive material, over or under the semiconductor layer. In one implementation, the bridge circuitry includes conductive portions that extend across and electrically contact the lower surface of each sensor's semiconductor slab. The bridge circuitry can also include pads that can be electrically contacted, such as by pogo pins. The device's reaction surface can be spaced apart from or over the thermal sensors. The device's components can be shaped and positioned so that the bridge's offset voltage is below the sensitivity level required for an application, such as by left-right symmetry about an axis.
公开/授权文献
- US07833800B2 Thermal sensing with bridge circuitry 公开/授权日:2010-11-16
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