发明申请
US20050258280A1 Shower plate for plasma processing apparatus and plasma processing apparatus
审中-公开
等离子体处理装置和等离子体处理装置的淋浴板
- 专利标题: Shower plate for plasma processing apparatus and plasma processing apparatus
- 专利标题(中): 等离子体处理装置和等离子体处理装置的淋浴板
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申请号: US11118373申请日: 2005-05-02
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公开(公告)号: US20050258280A1公开(公告)日: 2005-11-24
- 发明人: Keiichi Goto , Makoto Kawai , Kenji Satoh
- 申请人: Keiichi Goto , Makoto Kawai , Kenji Satoh
- 申请人地址: JP Chiyoda-ku
- 专利权人: SHIN-ETSU CHEMICAL CO., LTD.
- 当前专利权人: SHIN-ETSU CHEMICAL CO., LTD.
- 当前专利权人地址: JP Chiyoda-ku
- 优先权: JP2004-153141 20040524
- 主分类号: H05H1/46
- IPC分类号: H05H1/46 ; B05B1/18 ; B05B3/04 ; C23C8/36 ; H01J37/32 ; H01L21/3065
摘要:
There is disclosed a shower plate 1, wherein the shower plate has a plurality of holes 3 for inserting the head of the fastening member and holes 4 for fitting the head are formed integrally along a concentric circle in the outside region of the gas feeding holes 2 on a side facing the supporting member, each hole for fitting extending in one direction of the concentric circle from each hole for insertion, each hole for fitting has a groove portion 4b through which the shank of the fastening member is to pass and a fitting portion 4a which is wider than the groove portion and in which the head of the fastening member is to be fitted, and the head of the fastening member fixed in the supporting member is inserted into the hole for insertion of the shower plate and the shower plate is turned so that the head of the fastening member is fitted in the fitting portion, and thereby the shower plate is supported by the supporting member without exposure of the fastening member. There can be provided a shower plate for a plasma processing apparatus, wherein effective diameter is large enough, contamination of a substrate to be treated can be prevented, it is easy to manufacture, and it is easy to fix to a supporting member.
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