公开(公告)号：US20050258280A1

公开(公告)日：2005-11-24

申请号：US11118373

申请日：2005-05-02

申请人： Keiichi Goto ,  Makoto Kawai ,  Kenji Satoh

发明人： Keiichi Goto ,  Makoto Kawai ,  Kenji Satoh

IPC分类号： H05H1/46 ,  B05B1/18 ,  B05B3/04 ,  C23C8/36 ,  H01J37/32 ,  H01L21/3065

CPC分类号： H01J37/3244 ,  B05B1/185 ,  C23C8/36 ,  H01L21/3065

摘要： There is disclosed a shower plate 1, wherein the shower plate has a plurality of holes 3 for inserting the head of the fastening member and holes 4 for fitting the head are formed integrally along a concentric circle in the outside region of the gas feeding holes 2 on a side facing the supporting member, each hole for fitting extending in one direction of the concentric circle from each hole for insertion, each hole for fitting has a groove portion 4b through which the shank of the fastening member is to pass and a fitting portion 4a which is wider than the groove portion and in which the head of the fastening member is to be fitted, and the head of the fastening member fixed in the supporting member is inserted into the hole for insertion of the shower plate and the shower plate is turned so that the head of the fastening member is fitted in the fitting portion, and thereby the shower plate is supported by the supporting member without exposure of the fastening member. There can be provided a shower plate for a plasma processing apparatus, wherein effective diameter is large enough, contamination of a substrate to be treated can be prevented, it is easy to manufacture, and it is easy to fix to a supporting member.

摘要翻译： 公开了一种喷淋板1，其中喷淋板具有用于插入紧固部件的头部的多个孔3，用于安装头部的孔4沿气体供给孔2的外部区域中的同心圆一体地形成 在面对支撑构件的一侧，每个孔用于从每个孔插入同心圆的一个方向延伸，每个用于装配的孔具有凹槽部分4b，紧固构件的柄将穿过该槽部分4b和配件 部分4a，其宽于凹槽部分，并且紧固构件的头部将被装配在其中，并且固定在支撑构件中的紧固构件的头部插入到用于插入淋浴板和淋浴器的孔中 板的转动使得紧固件的头部装配在装配部分中，从而淋浴板由支撑件支撑而不暴露紧固件。 可以提供一种用于等离子体处理装置的喷淋板，其中有效直径足够大，可以防止待处理基板的污染，易于制造，并且易于固定到支撑构件。

公开(公告)号：US06376977B1

公开(公告)日：2002-04-23

申请号：US09580638

申请日：2000-05-30

申请人： Makoto Kawai ,  Keiichi Goto ,  Kazuyoshi Tamura ,  Yoshihiro Kubota ,  Toshimi Kobayashi

发明人： Makoto Kawai ,  Keiichi Goto ,  Kazuyoshi Tamura ,  Yoshihiro Kubota ,  Toshimi Kobayashi

IPC分类号： G01M1102

CPC分类号： H01J37/32009 ,  H01J37/3255 ,  Y10T428/24421 ,  Y10T428/249969

摘要： There is disclosed a silicon electrode plate including silicon single crystal used as an upper electrode in a plasma etching apparatus wherein concentration of interstitial oxygen contained in the silicon electrode plate is not less than 5×1017 atoms/cm3 and not more than 1.5×1018 atoms/cm3, and the silicon electrode plate wherein nitrogen concentration in the silicon electrode plate is not less than 5×1013 atoms/cm3 and not more than 5×1015 atoms/cm3. There can be provided a silicon electrode plate consisting of silicon single crystal used as an upper electrode in a plasma etching apparatus wherein problems due to adhesion of impurities such as heavy metal or the like can be prevented.

摘要翻译： 公开了一种在等离子体蚀刻装置中用作上电极的硅单晶的硅电极板，其中硅电极板中所含的间隙氧的浓度不小于5×10 17原子/ cm 3且不大于1.5×10 18原子/ cm 3， 硅电极板中的氮浓度不小于5×10 13原子/ cm 3且不大于5×10 15原子/ cm 3的硅电极板。 在等离子体蚀刻装置中可以提供由用作上电极的硅单晶组成的硅电极板，其中可以防止由于诸如重金属等的杂质的附着而引起的问题。

公开(公告)号：US06815352B1

公开(公告)日：2004-11-09

申请号：US09696955

申请日：2000-10-27

申请人： Kazuyoshi Tamura ,  Makoto Kawai ,  Keiichi Goto

发明人： Kazuyoshi Tamura ,  Makoto Kawai ,  Keiichi Goto

IPC分类号： H01L21302

CPC分类号： H01J37/32642 ,  C30B15/00 ,  C30B29/06

摘要： There is disclosed a silicon focus ring consisting of silicon single crystal used as a silicon focus ring in a plasma apparatus, wherein concentration of interstitial oxygen contained in the silicon focus ring is not less than 5×1017 atoms/cm3 and not more than 1.5×1018 atoms/cm3, and a producing method for a silicon focus ring used for a plasma apparatus, wherein a single crystal silicon wherein concentration of interstitial oxygen contained in the silicon focus ring is not less than 5×1017 atoms/cm3 and not more than 1.5×1018 atoms/cm3 is grown by a Czochralski method, the single crystal silicon is processed in a circle, and a silicon focus ring is produced. There can be provided a silicon focus ring, which can prevent disadvantage due to impurities such as heavy metal.

摘要翻译： 公开了在等离子体装置中用作硅聚焦环的硅单晶组成的硅聚焦环，其中硅聚焦环中所含的间隙氧的浓度不小于5×10 17原子/ cm 3，而不是 大于1.5×10 18原子/ cm 3，以及用于等离子体装置的硅聚焦环的制造方法，其中，在硅聚焦环中包含的间隙氧的浓度为5×10 6个以上的单晶硅 通过Czochralski法生长17个原子/ cm 3以上1.5×10 18个/ cm 3以下的单晶硅，制成硅聚焦环。 可以提供硅聚焦环，其可以防止由于诸如重金属的杂质导致的不利影响。

公开(公告)号：US20100189214A1

公开(公告)日：2010-07-29

申请号：US12376765

申请日：2007-08-08

申请人： Koichi Shibata ,  Kazuhiro Mori ,  Shingo Baba ,  Daisuke Notohara ,  Shinya Hirasawa ,  Keiichi Goto ,  Yukio Mishina

发明人： Koichi Shibata ,  Kazuhiro Mori ,  Shingo Baba ,  Daisuke Notohara ,  Shinya Hirasawa ,  Keiichi Goto ,  Yukio Mishina

IPC分类号： H05G1/60 ,  A61B6/03 ,  G06K9/00

CPC分类号： A61B6/025 ,  A61B6/027 ,  A61B6/4233 ,  A61B6/4441 ,  A61B6/5205 ,  A61B6/5241

摘要： An X-ray tube and a flat panel X-ray detector (FPD) are constructed movable parallel to each other in the same direction along a body axis which is a longitudinal direction of a patient. The X-ray tube intermittently emits radiation and the FPD detects radiation transmitted through the patient irradiated intermittently whenever the X-ray tube and FPD move every pitch. X-ray images O1, O2, . . . , OI, . . . , and OM are decomposed for every pitch noted above. The decomposed images are composed for each projection angle to obtain projection images P1, P2 and so on. Therefore, a sectional image with a long field of view in the longitudinal direction can be obtained by carrying out a reconstruction process based on the composed projection images.

摘要翻译： X射线管和平板X射线检测器（FPD）被构造为沿着与患者的纵向方向相同的身体轴线在相同方向上彼此平行地移动。 每当X射线管和FPD移动每个间距时，X射线管间歇地发射辐射并且FPD检测间歇地照射的患者的辐射。 X射线图像O1，O2，。 。 。 ，OI，。 。 。 ，并且对于上述每个音调分解OM。 为每个投影角度构成分解图像以获得投影图像P1，P2等。 因此，通过基于组合的投影图像进行重建处理，可以获得纵向具有长视野的截面图像。

公开(公告)号：US20050073755A1

公开(公告)日：2005-04-07

申请号：US10945295

申请日：2004-09-20

申请人： Katsushi Takeo ,  Keiichi Goto ,  Satoru Fukuzawa

发明人： Katsushi Takeo ,  Keiichi Goto ,  Satoru Fukuzawa

IPC分类号： B29C45/38 ,  B29L11/00 ,  G02B7/02 ,  G11B7/09 ,  G11B7/12 ,  G11B7/135 ,  G11B7/22 ,  G11B17/00 ,  G11B21/16

CPC分类号： G11B7/0935 ,  G11B7/121 ,  Y10S425/808

摘要： The present invention provides a lens holder and a lens protector having little burrs and no gate marks formed on a surface thereof confronting an optical disc and a method of manufacturing the lens holder and the lens protector. The lens holder is formed in integration with a boss by injection-molding and has a hole capable of holding an objective lens on a surface of the lens holder confronting an optical disc. The boss having a gate and a contact portion which contacts a ejector pin is formed on a peripheral side surface of the lens holder when the injection molding is performed and cut off from the lens holder after the injection molding finishes.

摘要翻译： 本发明提供了一种在面对光盘的表面上形成有少量毛刺和没有门标记的透镜保持器和透镜保护器，以及制造透镜保持器和透镜保护器的方法。 透镜架通过注射成型与凸台一体形成，并且具有能够将物镜保持在面对光盘的透镜架的表面上的孔。 当进行注射成型时，在注射成型完成之后，在透镜保持器的周边侧表面上形成具有门和接触顶针的接触部分的凸起部。

公开(公告)号：US07602678B2

公开(公告)日：2009-10-13

申请号：US10945295

申请日：2004-09-20

申请人： Katsushi Takeo ,  Keiichi Goto ,  Satoru Fukuzawa

发明人： Katsushi Takeo ,  Keiichi Goto ,  Satoru Fukuzawa

IPC分类号： G11B7/09 ,  B29C45/38 ,  B29C45/26

CPC分类号： G11B7/0935 ,  G11B7/121 ,  Y10S425/808

摘要： The present invention provides a lens holder and a lens protector having little burrs and no gate marks formed an a surface thereof confronting an optical disc and a method of manufacturing the lens holder and the lens protector. The lens holder is formed in integration with a boss by injection-molding and has a hole capable of holding an objective lens on a surface of the lens holder confronting an optical disc. The boss having a gate and a contact portion which contacts a ejector pin is formed on a peripheral side surface of the lens holder when the injection molding is performed and cut off from the lens holder after the injection molding finishes.

摘要翻译： 本发明提供了一种镜片保持器和具有很小毛刺的镜片保护器和形成与光盘相对的表面的门标记，以及制造透镜保持器和透镜保护器的方法。 透镜架通过注射成型与凸台一体形成，并且具有能够将物镜保持在面对光盘的透镜架的表面上的孔。 当进行注射成型时，在注射成型完成之后，在透镜保持器的周边侧表面上形成具有门和接触顶针的接触部分的凸起部。

公开(公告)号：US07940887B2

公开(公告)日：2011-05-10

申请号：US12376765

申请日：2007-08-08

申请人： Koichi Shibata ,  Kazuhiro Mori ,  Shingo Baba ,  Daisuke Notohara ,  Shinya Hirasawa ,  Keiichi Goto ,  Yukio Mishina

发明人： Koichi Shibata ,  Kazuhiro Mori ,  Shingo Baba ,  Daisuke Notohara ,  Shinya Hirasawa ,  Keiichi Goto ,  Yukio Mishina

IPC分类号： A61B6/00

CPC分类号： A61B6/025 ,  A61B6/027 ,  A61B6/4233 ,  A61B6/4441 ,  A61B6/5205 ,  A61B6/5241

摘要： An X-ray tube and a flat panel X-ray detector (FPD) are constructed movable parallel to each other in the same direction along a body axis which is a longitudinal direction of a patient. The X-ray tube intermittently emits radiation and the FPD detects radiation transmitted through the patient irradiated intermittently whenever the X-ray tube and FPD move every pitch. X-ray images O1, O2, . . . , OI, . . . , and OM are decomposed for every pitch noted above. The decomposed images are composed for each projection angle to obtain projection images P1, P2 and so on. Therefore, a sectional image with a long field of view in the longitudinal direction can be obtained by carrying out a reconstruction process based on the composed projection images.

摘要翻译： X射线管和平板X射线检测器（FPD）被构造为沿着与患者的纵向方向相同的身体轴线在相同方向上彼此平行地移动。 每当X射线管和FPD移动每个间距时，X射线管间歇地发射辐射并且FPD检测间歇地照射的患者的辐射。 X射线图像O1，O2，。 。 。 ，OI，。 。 。 ，并且对于上述每个音调分解OM。 为每个投影角度构成分解图像以获得投影图像P1，P2等。 因此，通过基于组合的投影图像进行重建处理，可以获得纵向具有长视野的截面图像。

公开(公告)号：US4380284A

公开(公告)日：1983-04-19

申请号：US189297

申请日：1980-09-22

申请人： Takeshi Ito ,  Shuzo Ishizuka ,  Keiichi Goto ,  Keiki Saito

发明人： Takeshi Ito ,  Shuzo Ishizuka ,  Keiichi Goto ,  Keiki Saito

IPC分类号： B23Q11/00 ,  B65G45/08 ,  B65G45/10 ,  B65G45/00

CPC分类号： B23Q11/0057 ,  B65G45/08 ,  B65G45/105 ,  Y02P70/171

摘要： A chip conveyer which comprises a cylindrical trough having a discharge gate at one end thereof and a plurality of feed openings to receive metal chip and a plurality of endless chains laid within the trough thereby metal chip is transmitted from feed openings to the discharge gate and clinging chip to the endless chains is split by vibration generated by means of a cam means.

摘要翻译： 一种芯片输送机，其包括在其一端具有排出门的圆柱形槽和用于接纳金属屑的多个进料开口和放置在槽内的多个环形链，从而将金属屑从进料口传送到排出口并附着 通过凸轮装置产生的振动使得环形链的芯片分裂。