发明申请
- 专利标题: Arrangement and process for protecting fuses/anti-fuses
- 专利标题(中): 保险丝/防熔丝的安排和处理
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申请号: US10957492申请日: 2004-10-01
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公开(公告)号: US20050258506A1公开(公告)日: 2005-11-24
- 发明人: Axel Brintzinger , Octavio Trovarelli , David Wallis , Wolfgang Leiberg
- 申请人: Axel Brintzinger , Octavio Trovarelli , David Wallis , Wolfgang Leiberg
- 优先权: DE10346460.3 20031002
- 主分类号: H01L21/82
- IPC分类号: H01L21/82 ; H01L23/28 ; H01L23/525 ; H01L29/00
摘要:
An arrangement for protecting fuses/anti-fuses on chips which serve to activate redundant circuits or chip functions includes a passivation layer (e.g., hard passivation) arranged on a fully processed chip with the exception of metal contacts of a metallization level and the fuses. The chip is provided with a redistribution layer that is electrically contact-connected to the metallization level, and to a process for protecting such fuses/anti-fuses. The invention is now based on the object of ensuring sufficient protection of fuses/anti-fuses on integrated circuits. This is achieved by virtue of the fact that a dielectric (3.1, 3.2), which covers at least the region of the fuses/anti-fuses (4) and to which the redistribution layer (2) comprising the combination of materials Cu/Ni/Au is applied, is arranged on the passivation layer (5).
公开/授权文献
- US07235859B2 Arrangement and process for protecting fuses/anti-fuses 公开/授权日:2007-06-26
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