发明申请
- 专利标题: Vacuum pumping system and method for monitoring of the same
- 专利标题(中): 真空泵系统及其监控方法
-
申请号: US11190941申请日: 2005-07-28
-
公开(公告)号: US20050260081A1公开(公告)日: 2005-11-24
- 发明人: Masayuki Tanaka , Takashi Nakao , Yukihiro Ushiku
- 申请人: Masayuki Tanaka , Takashi Nakao , Yukihiro Ushiku
- 专利权人: Kabushiki Kaisha Toshiba
- 当前专利权人: Kabushiki Kaisha Toshiba
- 优先权: JPP2001-263533 20010831
- 主分类号: F04B49/10
- IPC分类号: F04B49/10 ; C23C16/44 ; F04B37/16 ; H01L21/02 ; F04B49/00 ; F04B1/00
摘要:
A vacuum pumping system includes: an evacuation conduit, having a sequence of monitoring zones serially assigned in an exhaust direction; sensors respectively provided to the monitoring zones and independently detecting the conditions of the monitoring zones; heaters respectively provided to the monitoring zones and being paired with the sensors; and a control unit receiving data signals from the sensors, comparing the data signals with a threshold value, and when the data signals from a specific sensor exceed the threshold value, selectively supplying heating power to a heater of the monitoring zone where the specific sensor is provided.
信息查询