发明申请
US20050260081A1 Vacuum pumping system and method for monitoring of the same 审中-公开
真空泵系统及其监控方法

Vacuum pumping system and method for monitoring of the same
摘要:
A vacuum pumping system includes: an evacuation conduit, having a sequence of monitoring zones serially assigned in an exhaust direction; sensors respectively provided to the monitoring zones and independently detecting the conditions of the monitoring zones; heaters respectively provided to the monitoring zones and being paired with the sensors; and a control unit receiving data signals from the sensors, comparing the data signals with a threshold value, and when the data signals from a specific sensor exceed the threshold value, selectively supplying heating power to a heater of the monitoring zone where the specific sensor is provided.
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