发明申请
US20050260522A1 Permanent resist composition, cured product thereof, and use thereof
审中-公开
永久抗蚀剂组合物,其固化产物及其用途
- 专利标题: Permanent resist composition, cured product thereof, and use thereof
- 专利标题(中): 永久抗蚀剂组合物,其固化产物及其用途
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申请号: US11054651申请日: 2005-02-09
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公开(公告)号: US20050260522A1公开(公告)日: 2005-11-24
- 发明人: William Weber , Satoshi Mori , Nao Honda , Donald Johnson , Manuel DoCanto
- 申请人: William Weber , Satoshi Mori , Nao Honda , Donald Johnson , Manuel DoCanto
- 主分类号: C08G59/32
- IPC分类号: C08G59/32 ; C08G59/68 ; G03C1/492 ; G03F7/00 ; G03F7/038
摘要:
A permanent photoresist composition comprising: (A) one or more bisphenol A-novolac epoxy resins according to Formula I; wherein each group R in Formula I is individually selected from glycidyl or hydrogen and k in Formula I is a real number ranging from 0 to about 30; (B) one or more epoxy resins selected from the group represented by Formulas BIIa and BIIb; wherein each R1, R2 and R3 in Formula BIIa are independently selected from the group consisting of hydrogen or alkyl groups having 1 to 4 carbon atoms and the value of p in Formula BIIa is a real number ranging from 1 to 30; the values of n and m in Formula BIIb are independently real numbers ranging from 1 to 30 and each R4 and R5 in Formula BIIb are independently selected from hydrogen, alkyl groups having 1 to 4 carbon atoms, or trifluoromethyl; (C) one or more cationic photoinitiators (also known as photoacid generators or PAGs); and (D) one or more solvents.
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